Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12382634 | Semiconductor memory device that includes a plurality of first pillars, second pillars, and third pillars | Takuya NISHIKAWA | 2025-08-05 |
| 12232319 | Semiconductor memory device | Takuya NISHIKAWA | 2025-02-18 |
| 12041794 | Semiconductor storage device comprising staircase portion | Sota MATSUMOTO | 2024-07-16 |
| 11631693 | Semiconductor memory device | Genki Kawaguchi, Yusuke OKUMURA | 2023-04-18 |
| 11264387 | Semiconductor storage device comprising staircase portion and method for manufacturing the same | Sota MATSUMOTO | 2022-03-01 |
| 11037948 | Semiconductor storage device and method for manufacturing semiconductor storage device | Sonoe Matsushita, Kazuyuki Yoshimochi, Yoshihiro Yanai, Satoshi Usui | 2021-06-15 |
| 10915018 | Imprinting system, method of manufacturing semiconductor device, and recording medium | Yoshihisa Kawamura, Hironobu Tamura, Kiminori Yoshino, Suigen Kanda | 2021-02-09 |
| 10879137 | Template, template component, and semiconductor device manufacturing method | Suigen Kanda, Takamasa Usui, Masayoshi Tagami, Jun Iljima | 2020-12-29 |
| 10868029 | Staggered semiconductor memory device | Jun Iijima, Masayoshi Tagami, Takamasa Usui | 2020-12-15 |
| 10481488 | Mask blank substrate processing device, mask blank substrate processing method, mask blank substrate fabrication method, mask blank fabrication method, and transfer mask fabrication method | Takeyuki Yamada, Toshihiko Orihara | 2019-11-19 |
| 10331028 | Imprinting apparatus, recording medium, and imprinting method | Jun Iijima | 2019-06-25 |
| 10310373 | Method for manufacturing mask blank substrate, method for manufacturing mask blank and method for manufacturing transfer mask | Takeyuki Yamada | 2019-06-04 |
| 10192741 | Device substrate, method of manufacturing device substrate, and method of manufacturing semiconductor device | Yoshihisa Kawamura, Kazuhiro Takahata, Ikuo Yoneda, Yoshiharu Ono | 2019-01-29 |
| 9793120 | Device substrate, method of manufacturing device substrate, and method of manufacturing semiconductor device | Yoshihisa Kawamura, Kazuhiro Takahata, Ikuo Yoneda, Yoshiharu Ono | 2017-10-17 |
| 9778209 | Substrate for mask blanks, mask blank, transfer mask, and method of manufacturing them | Kazuki Aoyama | 2017-10-03 |
| 9400421 | Mask blank substrate, mask blank, reflective mask blank, transfer mask, reflective mask, and methods of manufacturing the same | Tatsuya Sasaki | 2016-07-26 |