Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11037948 | Semiconductor storage device and method for manufacturing semiconductor storage device | Sonoe Matsushita, Takahito Nishimura, Yoshihiro Yanai, Satoshi Usui | 2021-06-15 |
| 10036959 | Reflection mask and pattern formation method | Masaru Suzuki, Hiroyuki Mizuno | 2018-07-31 |
| 8906585 | Method of manufacturing semiconductor device and exposure device | — | 2014-12-09 |