Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10620527 | Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask blank, transmissive mask, reflective mask, and semiconductor device fabrication method | Kazuhiro Hamamoto, Hirofumi Kozakai, Youichi Usui, Tsutomu Shoki, Junichi Horikawa | 2020-04-14 |
| 10481488 | Mask blank substrate processing device, mask blank substrate processing method, mask blank substrate fabrication method, mask blank fabrication method, and transfer mask fabrication method | Takeyuki Yamada, Takahito Nishimura | 2019-11-19 |
| 10429728 | Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask blank, transmissive mask, reflective mask, and semiconductor device fabrication method | Kazuhiro Hamamoto, Hirofumi Kozakai, Youichi Usui, Tsutomu Shoki, Junichi Horikawa | 2019-10-01 |
| 10295900 | Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask, and semiconductor device fabrication method | Kazuhiro Hamamoto, Hirofumi Kozakai, Youichi Usui, Tsutomu Shoki, Junichi Horikawa | 2019-05-21 |
| 10175394 | Substrate with multilayer reflective film, mask blank, transfer mask and method of manufacturing semiconductor device | Kazuhiro Hamamoto | 2019-01-08 |
| 10025176 | Mask blank substrate, substrate with multilayer reflective film, reflective mask blank, reflective mask, method of manufacturing mask blank substrate, method of manufacturing substrate with reflective film and method of manufacturing semiconductor device | Kazuhiro Hamamoto, Tsutomu Shoki, Junichi Horikawa | 2018-07-17 |
| 10001699 | Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask, and semiconductor device fabrication method | Kazuhiro Hamamoto, Hirofumi Kozakai, Youichi Usui, Tsutomu Shoki, Junichi Horikawa | 2018-06-19 |
| 9897909 | Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask blank, transmissive mask, reflective mask, and semiconductor device fabrication method | Kazuhiro Hamamoto, Hirofumi Kozakai, Youichi Usui, Tsutomu Shoki, Junichi Horikawa | 2018-02-20 |
| 9798050 | Substrate with multilayer reflective film, mask blank, transfer mask and method of manufacturing semiconductor device | Kazuhiro Hamamoto | 2017-10-24 |
| 9581895 | Mask blank substrate, substrate with multilayer reflective film, reflective mask blank, reflective mask, method of manufacturing mask blank substrate, method of manufacturing substrate with reflective film and method of manufacturing semiconductor device | Kazuhiro Hamamoto, Tsutomu Shoki, Junichi Horikawa | 2017-02-28 |
| 9507254 | Method of manufacturing substrate with a multilayer reflective film, method of manufacturing a reflective mask blank, substrate with a multilayer reflective film, reflective mask blank, reflective mask and method of manufacturing a semiconductor device | Kazuhiro Hamamoto, Hirofumi Kozakai, Tsutomu Shoki, Junichi Horikawa | 2016-11-29 |
| 9494851 | Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask, and semiconductor device fabrication method | Kazuhiro Hamamoto, Hirofumi Kozakai, Youichi Usui, Tsutomu Shoki, Junichi Horikawa | 2016-11-15 |
| 9488904 | Mask blank glass substrate, multilayer reflective film coated substrate, mask blank, mask, and methods of manufacturing the same | Akihiro Kawahara, Tsutomu Shoki | 2016-11-08 |
| 9383637 | Substrate with multilayer reflective film, reflective mask blank for EUV lithography, method of manufacturing reflective mask for EUV lithography and method of manufacturing semiconductor device | Takahiro Onoue | 2016-07-05 |
| 9348217 | Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask blank, transmissive mask, reflective mask, and semiconductor device fabrication method | Kazuhiro Hamamoto, Hirofumi Kozakai, Youichi Usui, Tsutomu Shoki, Junichi Horikawa | 2016-05-24 |
| 9195131 | Mask blank glass substrate, multilayer reflective film coated substrate, mask blank, mask, and methods of manufacturing the same | Akihiro Kawahara, Tsutomu Shoki | 2015-11-24 |