Issued Patents All Time
Showing 1–25 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11333969 | Imprint apparatus, imprint method, and article manufacturing method | Keiji Yamashita, Yutaka Watanabe, Takuya Kono, Masayuki Hatano | 2022-05-17 |
| 11282723 | Liquid delivery member, liquid delivery apparatus, and semiconductor device manufacturing method | Hironobu Tamura, Yoshiharu Ono | 2022-03-22 |
| RE48815 | Method of designing a template pattern, method of manufacturing a template and method of manufacturing a semiconductor device | Ryoichi Inanami, Hiroshi TOKUE | 2021-11-09 |
| 10241397 | Imprint apparatus and imprint method | Manabu Takakuwa, Yoshihisa Kawamura | 2019-03-26 |
| 10192741 | Device substrate, method of manufacturing device substrate, and method of manufacturing semiconductor device | Takahito Nishimura, Yoshihisa Kawamura, Kazuhiro Takahata, Yoshiharu Ono | 2019-01-29 |
| 10168615 | Imprint apparatus, imprint method, and article manufacturing method | Keiji Yamashita, Yutaka Watanabe, Takuya Kono, Masayuki Hatano | 2019-01-01 |
| RE47093 | Imprint pattern forming method | Hiroshi TOKUE, Ryoichi Inanami | 2018-10-23 |
| 10018908 | Pattern forming method | Naomi Shida, Kenji Todori, Shigehiko Mori, Reiko Yoshimura, Hiroyuki Kashiwagi +1 more | 2018-07-10 |
| 9944014 | Pattern forming method and pattern forming apparatus | — | 2018-04-17 |
| 9793120 | Device substrate, method of manufacturing device substrate, and method of manufacturing semiconductor device | Takahito Nishimura, Yoshihisa Kawamura, Kazuhiro Takahata, Yoshiharu Ono | 2017-10-17 |
| 9588418 | Pattern forming method | Naomi Shida, Kenji Todori, Shigehiko Mori, Reiko Yoshimura, Hiroyuki Kashiwagi +1 more | 2017-03-07 |
| 9550322 | Near-field exposure mask, resist pattern forming method, device manufacturing method, near-field exposure method, pattern forming method, near-field optical lithography member, and near-field nanoimprint method | Naomi Shida, Kenji Todori, Shigehiko Mori, Ko Yamada, Masakazu Yamagiwa +4 more | 2017-01-24 |
| RE46191 | Imprint pattern forming method | Hiroshi TOKUE, Ryoichi Inanami | 2016-11-01 |
| 9403316 | Pattern forming method and pattern forming apparatus | — | 2016-08-02 |
| 9381540 | Pattern forming method | Takeshi Koshiba, Tetsuro Nakasugi | 2016-07-05 |
| 9377777 | Fine processing method, fine processing apparatus, and recording medium with fine processing program recorded thereon | Yasutada Nakagawa, Takuya Kono, Masayuki Hatano | 2016-06-28 |
| 9046763 | Pattern forming method | Takeshi Koshiba, Tetsuro Nakasugi | 2015-06-02 |
| 9029047 | Near-field exposure mask, resist pattern forming method, device manufacturing method, near-field exposure method, pattern forming method, near-field optical lithography member, and near-field nanoimprint method | Naomi Shida, Kenji Todori, Shigehiko Mori, Ko Yamada, Masakazu Yamagiwa +4 more | 2015-05-12 |
| 8973494 | Imprint method and imprint apparatus | Masayuki Hatano, Tetsuro Nakasugi, Kenji Ooki | 2015-03-10 |
| 8946080 | Pattern transfer method | — | 2015-02-03 |
| 8945798 | Near-field exposure mask and pattern forming method | Naomi Shida, Kenji Todori, Shigehiko Mori, Reiko Yoshimura, Hiroyuki Kashiwagi +1 more | 2015-02-03 |
| 8691123 | Fine processing method, fine processing apparatus, and recording medium with fine processing program recorded thereon | Yasutada Nakagawa, Takuya Kono, Masayuki Hatano | 2014-04-08 |
| 8485624 | Droplet dispensing control method, droplet dispensing control device, and method of manufacturing semiconductor devices | Shinji Mikami | 2013-07-16 |
| 8480946 | Imprint method and template for imprinting | Shinji Mikami | 2013-07-09 |
| 8468480 | Method of designing a template pattern, method of manufacturing a template and method of manufacturing a semiconductor device | Ryoichi Inanami, Hiroshi TOKUE | 2013-06-18 |