Issued Patents All Time
Showing 1–25 of 50 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12078925 | Imprint apparatus and imprint method | Kazuya Fukuhara, Masaki Mitsuyasu, Masato Suzuki, Takuya Kono | 2024-09-03 |
| 11953825 | Imprint apparatus, imprint method, and manufacturing method of semiconductor device | Masayuki Hatano, Kei Kobayashi | 2024-04-09 |
| 11837469 | Imprint apparatus, imprint method, and method of manufacturing semiconductor device | Kazuya Fukuhara, Masayuki Hatano | 2023-12-05 |
| 11004683 | Imprint apparatus, imprint method, and method of manufacturing semiconductor device | Kazuya Fukuhara, Masayuki Hatano | 2021-05-11 |
| 10796948 | Pattern forming method and imprint apparatus | Anupam Mitra, Kazuhiro Takahata | 2020-10-06 |
| 9885118 | Template forming method, template, and template base material | Masatoshi Tsuji, Masayuki Hatano, Yohko Komatsu | 2018-02-06 |
| 9381540 | Pattern forming method | Takeshi Koshiba, Ikuo Yoneda | 2016-07-05 |
| 9360752 | Pattern formation method | Masatoshi Tsuji, Masayuki Hatano | 2016-06-07 |
| 9188879 | Substrate holding apparatus, pattern transfer apparatus, and pattern transfer method | Kentaro Kasa, Manabu Takakuwa, Ryoichi Inanami, Kazuto Matsuki, Hiroshi Koizumi +1 more | 2015-11-17 |
| 9046763 | Pattern forming method | Takeshi Koshiba, Ikuo Yoneda | 2015-06-02 |
| 8992789 | Method for manufacturing mold | Masato Suzuki | 2015-03-31 |
| 8973494 | Imprint method and imprint apparatus | Masayuki Hatano, Ikuo Yoneda, Kenji Ooki | 2015-03-10 |
| 8895210 | Method for fabricating pellicle, photo mask, and semiconductor device | Masato Suzuki | 2014-11-25 |
| 8883373 | Method for manufacturing photo mask, method for manufacturing semiconductor device, and program | Akiko Mimotogi, Suigen Kyoh | 2014-11-11 |
| 8550801 | Imprint apparatus and method | Yohko FURUTONO, Shinji Mikami, Masayuki Hatano | 2013-10-08 |
| 8419995 | Imprint method | Ikuo Yoneda, Kentaro Matsunaga, Yukiko Kikuchi, Yoshihisa Kawamura, Eishi Shiobara +2 more | 2013-04-16 |
| 8227267 | Template inspection method and manufacturing method for semiconductor device | Ikuo Yoneda, Masamitsu Itoh, Ryoichi Inanami | 2012-07-24 |
| 8202463 | Imprint method | Ikuo Yoneda, Shinji Mikami | 2012-06-19 |
| 8180472 | Control method for semiconductor manufacturing apparatus, control system for semiconductor manufacturing apparatus, and manufacturing method for semiconductor device | Masayuki Hatano | 2012-05-15 |
| 8118585 | Pattern formation method and a method for manufacturing a semiconductor device | Masayuki Hatano, Suigen Kyoh | 2012-02-21 |
| 7985958 | Electron beam drawing apparatus, deflection amplifier, deflection control device, electron beam drawing method, method of manufacturing semiconductor device, and electron beam drawing program | Kazuo Tawarayama, Hiroyuki Mizuno, Takumi Ota, Noriaki Sasaki, Tatsuhiko Higashiki +2 more | 2011-07-26 |
| 7889910 | Character pattern extracting method, charged particle beam drawing method, and character pattern extracting program | Takumi Ota, Takeshi Koshiba, Noriaki Sasaki | 2011-02-15 |
| 7648809 | Electron beam exposure method, hot spot detecting apparatus, semiconductor device manufacturing method, and computer program product | — | 2010-01-19 |
| 7482604 | Electron beam lithography apparatus, lithography method, lithography program, and manufacturing method of a semiconductor device | Noriaki Sasaki, Takeshi Koshiba, Takumi Ota | 2009-01-27 |
| 7459705 | Charged particle beam exposure method of character projection system, charged particle beam exposure device of character projection system, program for use in charged particle beam exposure device, and manufacturing method of semiconductor device | Ryoichi Inanami, Takumi Ota, Takeshi Koshiba | 2008-12-02 |