Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11841331 | Measuring and calculating apparatus and measuring and calculating program | — | 2023-12-12 |
| 10955753 | Substrate processing control apparatus, recording medium, and method of manufacturing photomask | — | 2021-03-23 |
| 10325857 | Semiconductor device manufacturing method and semiconductor wafer | — | 2019-06-18 |
| 9952505 | Imprint device and pattern forming method | Yosuke Okamoto, Nobuhiro Komine, Kazuhiro Segawa, Manabu Takakuwa | 2018-04-24 |
| 9941177 | Pattern accuracy detecting apparatus and processing system | Kazuya Fukuhara, Kazutaka Ishigo, Manabu Takakuwa, Yoshinori Hagio, Kazuhiro Segawa +4 more | 2018-04-10 |
| 9188879 | Substrate holding apparatus, pattern transfer apparatus, and pattern transfer method | Manabu Takakuwa, Ryoichi Inanami, Kazuto Matsuki, Tetsuro Nakasugi, Hiroshi Koizumi +1 more | 2015-11-17 |
| 8953163 | Exposure apparatus, exposure method, and method of manufacturing semiconductor device | Manabu Takakuwa, Yosuke Okamoto, Masamichi Kishimoto | 2015-02-10 |
| 8878129 | Pattern measurement apparatus and pattern measurement method | — | 2014-11-04 |
| 8085393 | Exposure apparatus inspection method and method for manufacturing semiconductor device | Takashi Sato, Kazuya Fukuhara | 2011-12-27 |