Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12243237 | Pattern-edge detection method, pattern-edge detection apparatus, and storage medium storing program for causing a computer to perform pattern-edge detection | — | 2025-03-04 |
| 10599056 | Position measuring method, position measuring apparatus, and semiconductor device manufacturing method | Miki Toshima, Osamu Yamane | 2020-03-24 |
| 9952505 | Imprint device and pattern forming method | Nobuhiro Komine, Kazuhiro Segawa, Manabu Takakuwa, Kentaro Kasa | 2018-04-24 |
| 9941177 | Pattern accuracy detecting apparatus and processing system | Kentaro Kasa, Kazuya Fukuhara, Kazutaka Ishigo, Manabu Takakuwa, Yoshinori Hagio +4 more | 2018-04-10 |
| 9784573 | Positional deviation measuring device, non-transitory computer-readable recording medium containing a positional deviation measuring program, and method of manufacturing semiconductor device | Hidenori Sato, Nobuhiro Komine, Manabu Takakuwa | 2017-10-10 |
| 9244365 | Method for measuring pattern misalignment | Yoshinori Hagio | 2016-01-26 |
| 9146458 | EUV mask | Yoshinori Hagio | 2015-09-29 |
| 8976356 | Measurement mark, method for measurement, and measurement apparatus | Nobuhiro Komine | 2015-03-10 |
| 8953163 | Exposure apparatus, exposure method, and method of manufacturing semiconductor device | Kentaro Kasa, Manabu Takakuwa, Masamichi Kishimoto | 2015-02-10 |
| 8914766 | Dose-data generating apparatus | Takashi Koike | 2014-12-16 |
| 8859167 | Pattern forming method, positional deviation measuring method and photomask | Yoshinori Hagio | 2014-10-14 |
| 8832607 | Method for making correction map of dose amount, exposure method, and method for manufacturing semiconductor device | Takashi Koike, Hiroyuki Mizuno | 2014-09-09 |
| 8790851 | Mask and method for fabricating semiconductor device | Kazutaka Ishigo, Taketo Kuriyama | 2014-07-29 |
| 8778570 | Photomask and method for manufacturing the same | Kentaro Okuda, Takaki Hashimoto, Hidenori Sato | 2014-07-15 |
| 8504951 | Dose-data generating apparatus, dose-data generating method, and manufacturing method of semiconductor device | Takashi Koike | 2013-08-06 |
| 8320658 | Unevenness inspection method, method for manufacturing display panel, and unevenness inspection apparatus | Hiroyuki Tanizaki, Naoko Toyoshima, Yasunori Takase | 2012-11-27 |
| 7953263 | X-ray CT apparatus and image processing apparatus | Satoru Nakanishi | 2011-05-31 |
| 7609803 | Method for estimating scattered ray intensity in X-ray CT and X-ray CT apparatus | Naruomi Akino | 2009-10-27 |
| 7538448 | Power supply circuit structure comprising a current sensor, and method of assembling the same | Noriyuki Yoshida, Hiroyuki Wakamatsu | 2009-05-26 |
| 7457741 | Device for transmitting speech information | Seiji Nakagawa, Kiyoshi Fujimoto, Yoh-ichi Fujisaka | 2008-11-25 |