Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11387131 | Alignment apparatus and method of manufacturing semiconductor device | Osamu Yamane | 2022-07-12 |
| 11031306 | Quality control method of position measurement light source, semiconductor manufacturing apparatus, and method for manufacturing semiconductor device | Sadatoshi Murakami | 2021-06-08 |
| 10599056 | Position measuring method, position measuring apparatus, and semiconductor device manufacturing method | Osamu Yamane, Yosuke Okamoto | 2020-03-24 |
| 10295409 | Substrate measurement system, method of measuring substrate, and computer program product | Satoshi Usui, Manabu Takakuwa, Nobuhiro Komine, Takaki Hashimoto | 2019-05-21 |