Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411007 | Measurement device and measurement method | Hiroyuki Tanizaki | 2025-09-09 |
| 10295409 | Substrate measurement system, method of measuring substrate, and computer program product | Miki Toshima, Satoshi Usui, Manabu Takakuwa, Nobuhiro Komine | 2019-05-21 |
| 10151972 | Manufacturing method of photomask and recording medium | Satoshi Usui, Naoki Sato, Kouichi Nakayama, Masahiro Miyairi, Syogo Okamoto | 2018-12-11 |
| 10120275 | Layout method of mask pattern, manufacturing method of a semiconductor device and exposure mask | Masakazu Hamasaki, Yoshihiro Yanai, Michiya Takimoto, Naoki Sato, Satoshi Usui | 2018-11-06 |
| 9910363 | Measurement apparatus, exposure apparatus, measurement method, and recording medium | Ai FURUBAYASHI | 2018-03-06 |
| 9703912 | Mask set, fabrication method of mask set, manufacturing method of semiconductor device, and recording medium | Ai FURUBAYASHI, Takashi Obara, Nobuhiro Komine | 2017-07-11 |
| 9698157 | Microstructure device and method for manufacturing the same | Yuko Kono, Yuji Setta, Toshiya Kotani, Chikaaki Kodama | 2017-07-04 |
| 9257367 | Integrated circuit device, method for producing mask layout, and program for producing mask layout | Motohiro Okada, Shuhei Sota, Yasunobu Kai, Kazuyuki Masukawa, Yuko Kono +3 more | 2016-02-09 |
| 8865589 | Semiconductor device and manufacturing method of semiconductor device | Yasunobu Kai, Toshiya Kotani | 2014-10-21 |
| 8778570 | Photomask and method for manufacturing the same | Kentaro Okuda, Yosuke Okamoto, Hidenori Sato | 2014-07-15 |
| 8679731 | Semiconductor device manufacturing method | Kazuya Fukuhara, Kazuyuki Masukawa, Yasunobu Kai | 2014-03-25 |
| 8293456 | Semiconductor device manufacturing method | Kazuya Fukuhara, Kazuyuki Masukawa, Yasunobu Kai | 2012-10-23 |
| 8288812 | Semiconductor device and method of manufacturing the same | Yasunobu Kai | 2012-10-16 |