Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9910363 | Measurement apparatus, exposure apparatus, measurement method, and recording medium | Takaki Hashimoto | 2018-03-06 |
| 9703912 | Mask set, fabrication method of mask set, manufacturing method of semiconductor device, and recording medium | Takashi Obara, Takaki Hashimoto, Nobuhiro Komine | 2017-07-11 |