Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9406117 | Inspection system and method for inspecting line width and/or positional errors of a pattern | Takanao Touya, Shuichi Tamamushi, Hidenori Sato, Hiroyuki Tanizaki, Takeshi Fujiwara +4 more | 2016-08-02 |
| 9036896 | Inspection system and method for inspecting line width and/or positional errors of a pattern | Takanao Touya, Shuichi Tamamushi, Hidenori Sato, Hiroyuki Tanizaki, Takeshi Fujiwara +4 more | 2015-05-19 |
| 8778570 | Photomask and method for manufacturing the same | Yosuke Okamoto, Takaki Hashimoto, Hidenori Sato | 2014-07-15 |
| 5574800 | Pattern defect inspection method and apparatus | Hiromu Inoue | 1996-11-12 |