Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12009175 | Charged particle beam writing apparatus | Hirofumi Morita | 2024-06-11 |
| 11908659 | Multi charged particle beam writing apparatus | Toshiki Kimura, Hirofumi Morita, Mitsuhiro Okazawa | 2024-02-20 |
| 11804360 | Multi charged particle beam adjustment method, multi charged particle beam irradiation method, and multi charged particle beam irradiation apparatus | Tsubasa NANAO, Hirofumi Morita | 2023-10-31 |
| 11145483 | Charged particle beam writing apparatus, method of adjusting beam incident angle to target object surface, and charged particle beam writing method | Takahito Nakayama | 2021-10-12 |
| 10998164 | Charged particle beam writing apparatus and charged particle beam writing method | Hirofumi Morita, Munehiro Ogasawara | 2021-05-04 |
| 10504686 | Charged particle beam writing method and charged particle beam writing apparatus | Munehiro Ogasawara | 2019-12-10 |
| 10224171 | Blanking device for multi charged particle beams, and multi charged particle beam irradiation apparatus | Hiroshi Matsumoto, Munehiro Ogasawara, Hirofumi Morita | 2019-03-05 |
| 10192712 | Charged particle beam writing apparatus, method of adjusting beam incident angle to target object surface, and charged particle beam writing method | Takahito Nakayama | 2019-01-29 |
| 9916962 | Multi charged particle beam irradiation apparatus, multi charged particle beam irradiation method, and multi charged particle beam adjustment method | Shinsuke Nishimura, Munehiro Ogasawara, Hirofumi Morita | 2018-03-13 |
| 9824849 | Charged particle beam writing apparatus, method of adjusting beam incident angle to target object surface, and charged particle beam writing method | Takahito Nakayama | 2017-11-21 |
| 9406117 | Inspection system and method for inspecting line width and/or positional errors of a pattern | Shuichi Tamamushi, Hidenori Sato, Hiroyuki Tanizaki, Takeshi Fujiwara, Eiji Sawa +4 more | 2016-08-02 |
| 9373424 | Electron beam writing apparatus and electron beam writing method | Takahito Nakayama | 2016-06-21 |
| 9343266 | Charged particle beam pattern writing method and charged particle beam writing apparatus that corrects beam rotation utilizing a correlation table | Munehiro Ogasawara, Shuichi Tamamushi | 2016-05-17 |
| 9236223 | Charged particle beam writing apparatus, method of adjusting beam incident angle to target object surface, and charged particle beam writing method | Takahito Nakayama | 2016-01-12 |
| 9036896 | Inspection system and method for inspecting line width and/or positional errors of a pattern | Shuichi Tamamushi, Hidenori Sato, Hiroyuki Tanizaki, Takeshi Fujiwara, Eiji Sawa +4 more | 2015-05-19 |
| 8927941 | Multi charged particle beam writing apparatus and multi charged particle beam writing method with fixed voltage ratio einzel lens | Shuichi Tamamushi, Munehiro Ogasawara | 2015-01-06 |
| 8884254 | Charged particle beam writing apparatus | Munehiro Ogasawara | 2014-11-11 |
| 8835868 | Multi charged particle beam writing apparatus | Munehiro Ogasawara | 2014-09-16 |
| 8816276 | Electron beam writing apparatus and electron beam writing method | Takahito Nakayama | 2014-08-26 |
| 8791422 | Charged particle beam writing apparatus and charged particle beam writing method | Munehiro Ogasawara | 2014-07-29 |
| 8610096 | Charged particle beam writing apparatus and method | — | 2013-12-17 |
| 8067753 | Electron beam writing apparatus and method | — | 2011-11-29 |