Issued Patents All Time
Showing 1–25 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406828 | Optical system adjustment method for multi charged particle beam apparatus and computer readable recording medium | — | 2025-09-02 |
| 12009175 | Charged particle beam writing apparatus | Takanao Touya | 2024-06-11 |
| 11908659 | Multi charged particle beam writing apparatus | Toshiki Kimura, Takanao Touya, Mitsuhiro Okazawa | 2024-02-20 |
| 11804360 | Multi charged particle beam adjustment method, multi charged particle beam irradiation method, and multi charged particle beam irradiation apparatus | Tsubasa NANAO, Takanao Touya | 2023-10-31 |
| 11784335 | Hydrogen-energy control system and control method for hydrogen-energy control system | Takashi Akiba, Fumiyuki YAMANE, Shin Kato, Tetsuharu Tanoue | 2023-10-10 |
| 11756766 | Charged particle beam writing apparatus and charged particle beam writing method | Takahito Nakayama | 2023-09-12 |
| 11721520 | Semiconductor device, multi-charged-particle beam writing apparatus, and multi-charged-particle beam exposure apparatus | Kei OBARA, Kazuyuki Higashi, Miyoko Shimada, Yoshiaki Shimooka, Hitomi Yamaguchi +2 more | 2023-08-08 |
| 11710839 | Controller, controlling method, and record medium | Masahiko Murai, Shingo Tamaru, Takashi Akiba, Fumiyuki YAMANE, Shin Kato +1 more | 2023-07-25 |
| 11355302 | Multi-beam blanking device and multi-charged-particle-beam writing apparatus | Hiroshi Yamashita, Yoshikuni GOSHIMA, Hiroshi Matsumoto | 2022-06-07 |
| 11312815 | Polyurethane resin, producing method of polyurethane resin, and molded article | Daisuke Hasegawa, Hidetaka HONDA, Hiroshi Kanayama, Satoshi Yamasaki | 2022-04-26 |
| 11217428 | Multi charged particle beam writing apparatus | Mitsuhiro Okazawa | 2022-01-04 |
| 10998164 | Charged particle beam writing apparatus and charged particle beam writing method | Takanao Touya, Munehiro Ogasawara | 2021-05-04 |
| 10811224 | Multi-charged-particle beam writing apparatus | — | 2020-10-20 |
| 10388488 | Multi charged particle beam drawing apparatus and multi charged particle beam drawing method | Osamu Iizuka, Tsubasa NANAO | 2019-08-20 |
| 10224172 | Multi-beam optical system adjustment method, and multi-beam exposure apparatus | Munehiro Ogasawara | 2019-03-05 |
| 10224171 | Blanking device for multi charged particle beams, and multi charged particle beam irradiation apparatus | Takanao Touya, Hiroshi Matsumoto, Munehiro Ogasawara | 2019-03-05 |
| 9991086 | Multi charged particle beam writing method and multi charged particle beam writing apparatus | — | 2018-06-05 |
| 9916962 | Multi charged particle beam irradiation apparatus, multi charged particle beam irradiation method, and multi charged particle beam adjustment method | Shinsuke Nishimura, Munehiro Ogasawara, Takanao Touya | 2018-03-13 |
| 9760120 | Electronic device, mounting member, and mounting method | Wenhsiang Wu, Satoru Yasui, Atsushi Tatemichi, Yasuyuki Suzuki, Masanobu Asano | 2017-09-12 |
| 9530610 | Blanking aperture array device for multi-beams, and fabrication method of blanking aperture array device for multi-beams | Kazuhiro Chiba, Hiroshi Matsumoto, Munehiro Ogasawara, Ryoichi Yoshikawa, Hirokazu Yamada +6 more | 2016-12-27 |
| 9391029 | Electronic device | Shinya Hayashiyama, Tomokazu Yuasa, Tomofumi Miyamoto, Daisuke Maehara | 2016-07-12 |
| 9330881 | Blanking device for multi charged particle beams, and multi charged particle beam writing apparatus | Hiroshi Matsumoto | 2016-05-03 |
| 9141143 | Electronic device | — | 2015-09-22 |
| 9001277 | Television apparatus, electronic apparatus, and lens | Toshikatsu Nakamura | 2015-04-07 |
| 8634121 | Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method | Fusao Shimokawa, Shingo Uchiyama, Johji Yamaguchi, Makoto Sato, Kunihiko Sasakura +4 more | 2014-01-21 |