Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11721520 | Semiconductor device, multi-charged-particle beam writing apparatus, and multi-charged-particle beam exposure apparatus | Kei OBARA, Kazuyuki Higashi, Miyoko Shimada, Yoshiaki Shimooka, Hitomi Yamaguchi +2 more | 2023-08-08 |
| 11355302 | Multi-beam blanking device and multi-charged-particle-beam writing apparatus | Hiroshi Yamashita, Hirofumi Morita, Hiroshi Matsumoto | 2022-06-07 |
| 10714311 | Individual beam detector for multiple beams, multi-beam irradiation apparatus, and individual beam detection method for multiple beams | Victor Katsap, Rodney Kendall | 2020-07-14 |
| 10607908 | Semiconductor device | Kazuhiro Chiba, Shinsuke Nabeya, Shiro Okada, Kentaro Mori | 2020-03-31 |
| 8427919 | Pattern writing system and method and abnormality diagnosing method | Akira Noma | 2013-04-23 |
| 8258491 | Pattern writing system and parameters monitoring method for pattern writing apparatus | — | 2012-09-04 |
| 7989777 | Method for inspecting settling time of deflection amplifier, and method for judging failure of deflection amplifier | — | 2011-08-02 |
| 7898447 | Methods and systems for testing digital-to-analog converter/amplifier circuits | Seiichi Tsuchiya, Yoshimasa Sanmiya, John Kay, Chising Lai | 2011-03-01 |