Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11721520 | Semiconductor device, multi-charged-particle beam writing apparatus, and multi-charged-particle beam exposure apparatus | Kazuyuki Higashi, Miyoko Shimada, Yoshiaki Shimooka, Hitomi Yamaguchi, Yoshikuni GOSHIMA +2 more | 2023-08-08 |
| 9181081 | Electrical component and method of manufacturing the same | Yoshiaki Sugizaki, Yoshiaki Shimooka | 2015-11-10 |