Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347641 | Charged particle beam pattern forming device and charged particle beam apparatus | Hiroko Nakamura, Tomohiro Saito | 2025-07-01 |
| 11721520 | Semiconductor device, multi-charged-particle beam writing apparatus, and multi-charged-particle beam exposure apparatus | Kei OBARA, Kazuyuki Higashi, Miyoko Shimada, Hitomi Yamaguchi, Yoshikuni GOSHIMA +2 more | 2023-08-08 |
| 9676608 | Electrical device including a functional element in a cavity | Akihiro Kojima, Yoshiaki Sugizaki | 2017-06-13 |
| 9230744 | MEMS device and method of manufacturing the same | Kei Watanabe, Tomohiro Saito, Tamio Ikehashi | 2016-01-05 |
| 9202654 | MEMS device and manufacturing method thereof | — | 2015-12-01 |
| 9181081 | Electrical component and method of manufacturing the same | Kei OBARA, Yoshiaki Sugizaki | 2015-11-10 |
| 8987829 | Semiconductor device | Takashi Izumida, Hiroki Okamoto | 2015-03-24 |
| 8921951 | MEMS device and manufacturing method thereof | — | 2014-12-30 |
| 8921997 | Electrical component and method of manufacturing the same | Yoshiaki Sugizaki | 2014-12-30 |
| 8867875 | Semiconductor device using buried oxide layer as optical wave guides | — | 2014-10-21 |
| 8829359 | Electrical device including a functional element in a cavity | Akihiro Kojima, Yoshiaki Sugizaki | 2014-09-09 |
| 8309858 | Electrical device including a functional element in a cavity | Akihiro Kojima, Yoshiaki Sugizaki | 2012-11-13 |
| 7972887 | Micro-electro-mechanical-system package and method for manufacturing the same | — | 2011-07-05 |
| 7902068 | Manufacturing method of semiconductor device | Tadayoshi Watanabe, Naofumi Nakamura, Hayato Nasu | 2011-03-08 |
| 7855141 | Semiconductor device having multiple wiring layers and method of producing the same | Hideki Shibata, Hideshi Miyajima, Kazuhiro Tomioka | 2010-12-21 |
| 7786589 | Semiconductor device and method for manufacturing semiconductor device | Noriaki Matsunaga, Naofumi Nakamura | 2010-08-31 |
| 7768134 | Interconnect structure and method for semiconductor device | Tadashi Iijima | 2010-08-03 |
| 7745326 | Semiconductor device having multiple wiring layers and method of producing the same | Hideki Shibata, Hideshi Miyajima, Kazuhiro Tomioka | 2010-06-29 |
| 7589014 | Semiconductor device having multiple wiring layers and method of producing the same | Hideki Shibata, Hideshi Miyajima, Kazuhiro Tomioka | 2009-09-15 |
| 7574090 | Semiconductor device using buried oxide layer as optical wave guides | — | 2009-08-11 |
| 7524758 | Interconnect structure and method for semiconductor device | Tadashi Iijima | 2009-04-28 |
| 6781236 | Semiconductor device using a multilayer wiring structure | Noriaki Matsunaga, Hideki Shibata | 2004-08-24 |
| 6750138 | Semiconductor device of multi-wiring structure and method of manufacturing the same | Noriaki Matsunaga, Kazuyuki Higashi, Hideki Shibata | 2004-06-15 |
| 6563218 | Semiconductor device of multi-wiring structure and method of manufacturing the same | Noriaki Matsunaga, Kazuyuki Higashi, Hideki Shibata | 2003-05-13 |
| 6534870 | Apparatus and method for manufacturing a semiconductor device | Noriaki Matsunaga, Hideki Shibata, Rempei Nakata, Hideshi Miyajima, Motonobu Kawai | 2003-03-18 |