Issued Patents All Time
Showing 1–25 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11417626 | Manufacturing method of semiconductor device | Mie Matsuo | 2022-08-16 |
| 8822342 | Method to reduce depth delta between dense and wide features in dual damascene structures | Ravi Prakash Srivastava, Oluwafemi. O. Ogunsola, Craig Child, Muhammed Shafi Pallachalil, Habib Hichri +1 more | 2014-09-02 |
| 8008190 | Method of manufacturing semiconductor device | Nobuhide Yamada, Hideto Matsuyama | 2011-08-30 |
| 7999356 | Composition for film formation, insulating film, semiconductor device, and process for producing the semiconductor device | Yasushi Nakasaki, Nobuhide Yamada, Miyoko Shimada, Kei Watanabe | 2011-08-16 |
| 7855141 | Semiconductor device having multiple wiring layers and method of producing the same | Yoshiaki Shimooka, Hideki Shibata, Kazuhiro Tomioka | 2010-12-21 |
| 7842518 | Method for fabricating semiconductor device | — | 2010-11-30 |
| 7795142 | Method for fabricating a semiconductor device | Hideaki Masuda, Toshiaki Idaka | 2010-09-14 |
| 7745326 | Semiconductor device having multiple wiring layers and method of producing the same | Yoshiaki Shimooka, Hideki Shibata, Kazuhiro Tomioka | 2010-06-29 |
| 7589014 | Semiconductor device having multiple wiring layers and method of producing the same | Yoshiaki Shimooka, Hideki Shibata, Kazuhiro Tomioka | 2009-09-15 |
| 7569498 | Manufacturing method of semiconductor device | Hideaki Masuda, Tsutomu Shimayama | 2009-08-04 |
| 7534717 | Method of manufacturing semiconductor device | Keiji Fujita, Hideaki Masuda, Rempei Nakata, Miyoko Shimada | 2009-05-19 |
| 7462569 | Method of manufacturing semiconductor device | Keiji Fujita | 2008-12-09 |
| 7329601 | Method of manufacturing semiconductor device | — | 2008-02-12 |
| 7199038 | Method for fabricating semiconductor device | — | 2007-04-03 |
| 7154179 | Semiconductor device | Kiyotaka Tabuchi, Hideaki Masuda | 2006-12-26 |
| 7129175 | Method of manufacturing semiconductor device | Kazuyuki Higashi, Keiji Fujita, Toshiaki Hasegawa, Kiyotaka Tabuchi | 2006-10-31 |
| 7094681 | Semiconductor device fabrication method | Keiji Fujita, Rempei Nakata | 2006-08-22 |
| 6962870 | Method of manufacturing semiconductor device and semiconductor device | Hideaki Masuda, Rempei Nakata | 2005-11-08 |
| 6784092 | Method of forming insulating film and method of manufacturing semiconductor device | Miyoko Shimada, Rempei Nakata | 2004-08-31 |
| 6746969 | Method of manufacturing semiconductor device | Miyoko Shimada, Rempei Nakata, Hideto Matsuyama, Katsuya Okumura, Masahiko Hasunuma +1 more | 2004-06-08 |
| 6737363 | Method of manufacturing semiconductor device | Nobuhide Yamada, Nobuo Hayasaka, Nobuyuki Kurashima | 2004-05-18 |
| 6703302 | Method of making a low dielectric insulation layer | Miyoko Shimada, Rempei Nakata | 2004-03-09 |
| 6614096 | Method for manufacturing a semiconductor device and a semiconductor device | Akihiro Kojima | 2003-09-02 |
| 6558747 | Method of forming insulating film and process for producing semiconductor device | Rempei Nakata, Nobuhide Yamada, Akihiro Kojima, Takahiko Kurosawa, Eiji Hayashi +3 more | 2003-05-06 |
| 6534870 | Apparatus and method for manufacturing a semiconductor device | Yoshiaki Shimooka, Noriaki Matsunaga, Hideki Shibata, Rempei Nakata, Motonobu Kawai | 2003-03-18 |