Issued Patents All Time
Showing 1–25 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9698034 | Substrate storage container and substrate storage container mounting table | Yuuichi Kuroda, Masaki Hirano, Tsunekazu Yasutake | 2017-07-04 |
| 8071157 | Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus | Shinichi Ito, Tatsuhiko Ema, Kei Hayasaki, Nobuhide Yamada, Katsuya Okumura | 2011-12-06 |
| 7785984 | Manufacturing method for semiconductor device | Nobuhide Yamada | 2010-08-31 |
| 7604832 | Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus | Shinichi Ito, Tatsuhiko Ema, Kei Hayasaki, Nobuhide Yamada, Katsuya Okumura | 2009-10-20 |
| 7534717 | Method of manufacturing semiconductor device | Hideshi Miyajima, Keiji Fujita, Hideaki Masuda, Miyoko Shimada | 2009-05-19 |
| 7446061 | Method of forming insulating film, method of manufacturing semiconductor device and their controlling computer program | Hiroshi Sato, Yukio Nishiyama, Taketo Matsuda | 2008-11-04 |
| 7312018 | Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus | Shinichi Ito, Tatsuhiko Ema, Kei Hayasaki, Nobuhide Yamada, Katsuya Okumura | 2007-12-25 |
| 7094681 | Semiconductor device fabrication method | Keiji Fujita, Hideshi Miyajima | 2006-08-22 |
| 7052971 | Method for manufacturing semiconductor device | Yukio Nishiyama, Hirotaka Ogihara | 2006-05-30 |
| 6962870 | Method of manufacturing semiconductor device and semiconductor device | Hideaki Masuda, Hideshi Miyajima | 2005-11-08 |
| 6938638 | Gas circulating-processing apparatus | Hiroshi Kubota, Naruhiko Kaji, Itsuko Sakai, Takashi Yoda | 2005-09-06 |
| 6828684 | Semiconductor device and method of manufacturing the same | Hiroshi Ikegami, Takashi Yoda, Nobuo Hayasaka, Yoshimi Hisatsune | 2004-12-07 |
| 6800569 | Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus | Shinichi Ito, Tatsuhiko Ema, Kei Hayasaki, Nobuhide Yamada, Katsuya Okumura | 2004-10-05 |
| 6784092 | Method of forming insulating film and method of manufacturing semiconductor device | Hideshi Miyajima, Miyoko Shimada | 2004-08-31 |
| 6746969 | Method of manufacturing semiconductor device | Miyoko Shimada, Hideshi Miyajima, Hideto Matsuyama, Katsuya Okumura, Masahiko Hasunuma +1 more | 2004-06-08 |
| 6703302 | Method of making a low dielectric insulation layer | Hideshi Miyajima, Miyoko Shimada | 2004-03-09 |
| 6645881 | Method of forming coating film, method of manufacturing semiconductor device and coating solution | Nobuhide Yamada, Makoto Sugiura, Mutsuhiko Yoshioka, Takahiro Kitano, Shinji Kobayashi | 2003-11-11 |
| 6566261 | Semiconductor device and method of manufacturing the same | Hiroshi Ikegami, Takashi Yoda, Nobuo Hayasaka, Yoshimi Hisatsune | 2003-05-20 |
| 6558747 | Method of forming insulating film and process for producing semiconductor device | Nobuhide Yamada, Hideshi Miyajima, Akihiro Kojima, Takahiko Kurosawa, Eiji Hayashi +3 more | 2003-05-06 |
| 6534870 | Apparatus and method for manufacturing a semiconductor device | Yoshiaki Shimooka, Noriaki Matsunaga, Hideki Shibata, Hideshi Miyajima, Motonobu Kawai | 2003-03-18 |
| 6458713 | Method for manufacturing semiconductor device | Nobuhide Yamada, Hideshi Miyajima, Motonobu Kawai | 2002-10-01 |
| 6436849 | Method for manufacturing semiconductor device having low dielectric constant insulating film, wafer processing equipment and wafer storing box used in this method | Masahiko Hasunuma, Hideshi Miyajima, Hisashi Kaneko | 2002-08-20 |
| 6419557 | Polishing method and polisher used in the method | Haruki Nojo, Masako Kodera, Nobuo Hayasaka | 2002-07-16 |
| 6224464 | Polishing method and polisher used in the method | Haruki Nojo, Masako Kodera, Nobuo Hayasaka | 2001-05-01 |
| 6096631 | Method of manufacturing semiconductor device | Kenro Nakamura, Yusuke Kohyama, Nobuo Hayasaka | 2000-08-01 |