Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7371654 | Manufacturing method of semiconductor device with filling insulating film into trench | Atsuhiro Sato, Masayuki Ichige, Seiichi Mori, Yuji Takeuchi, Hiroaki Hazama +2 more | 2008-05-13 |
| 7084077 | Method of fabricating multilayer interconnect wiring structure having low dielectric constant insulator film with enhanced adhesivity | Katsumi Yoneda | 2006-08-01 |
| 6938638 | Gas circulating-processing apparatus | Hiroshi Kubota, Rempei Nakata, Itsuko Sakai, Takashi Yoda | 2005-09-06 |
| 6798038 | Manufacturing method of semiconductor device with filling insulating film into trench | Atsuhiro Sato, Masayuki Ichige, Seiichi Mori, Yuji Takeuchi, Hiroaki Hazama +2 more | 2004-09-28 |
| 6368977 | Semiconductor device manufacturing method | Masaki Narita, Yukimasa Yoshida, Katsuaki Aoki, Hiroshi Fujita, Takashi O +3 more | 2002-04-09 |
| 6164295 | CVD apparatus with high throughput and cleaning method therefor | Akio Ui, Hideshi Miyajima, Nobuo Hayasaka | 2000-12-26 |
| 6153509 | Method of manufacturing a semiconductor device | Kei Watanabe, Yukio Nishiyama, Hideshi Miyajima | 2000-11-28 |
| 5792326 | Method and apparatus for generating ozone and methods of its use | Minoru Harada, Ryoichi Shinjo, Manabu Tsujimura, Rempei Nakata, Kunihiro Miyazaki +1 more | 1998-08-11 |
| 5794114 | Ozonizer | Minoru Harada, Ryoichi Shinjo, Manabu Tsujimura, Rempei Nakata, Kunihiro Miyazaki | 1998-08-11 |
| 5702673 | Ozone generating apparatus | Yutaka Nakano, Rempei Nakata, Minoru Harada, Ryoichi Shinjo, Manabu Tsujimura | 1997-12-30 |
| 5632868 | Method and apparatus for generating ozone and methods of its use | Minoru Harada, Ryoichi Shinjo, Manabu Tsujimura, Rempei Nakata, Kunihiro Miyazaki +1 more | 1997-05-27 |
| 5571578 | Method for forming silicon oxide on a semiconductor | Riichirou Aoki, Hiroyuki Toyama, Hidemitsu Egawa, Takamitsu Yoshida, Yukio Nishiyama | 1996-11-05 |