Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7247888 | Film forming ring and method of manufacturing semiconductor device | Hirotaka Ogihara, Yukio Nishiyama, Akio Ui | 2007-07-24 |
| 6368977 | Semiconductor device manufacturing method | Masaki Narita, Yukimasa Yoshida, Katsuaki Aoki, Hiroshi Fujita, Toshimitsu Omine +3 more | 2002-04-09 |
| 6333246 | Semiconductor device manufacturing method using electrostatic chuck and semiconductor device manufacturing system | Masaki Narita, Yukimasa Yoshida, Katsuaki Aoki, Hiroshi Fujita, Osamu Yamazaki +2 more | 2001-12-25 |