Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8021565 | Surface treatment method, etching method, and method for manufacturing electronic device | Naoya Hayamizu, Kei Hattori, Yukihiro Oka, Hidemi Kanetaka, Makoto Hasegawa | 2011-09-20 |
| 7833911 | Method of manufacturing semiconductor device, apparatus of manufacturing semiconductor device and semiconductor device | Hiroshi Katsumata | 2010-11-16 |
| 6368977 | Semiconductor device manufacturing method | Masaki Narita, Yukimasa Yoshida, Hiroshi Fujita, Takashi O, Toshimitsu Omine +3 more | 2002-04-09 |
| 6333246 | Semiconductor device manufacturing method using electrostatic chuck and semiconductor device manufacturing system | Masaki Narita, Yukimasa Yoshida, Hiroshi Fujita, Osamu Yamazaki, Toshimitsu Omine +2 more | 2001-12-25 |
| 5955382 | Microwave excitation plasma processing apparatus and microwave excitation plasma processing method | Takeshi Yamauchi, Masashi Yamage | 1999-09-21 |