Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10971334 | High frequency antenna and plasma processing device | YUTA SUGIMOTO | 2021-04-06 |
| 10837113 | Shower head, processing apparatus, and shower plate | Satoshi Tsuno | 2020-11-17 |
| 8133348 | Plasma generating apparatus and plasma treatment apparatus | Ivan Petrov Ganachev, Yoshikazu Tsugami, Kohei Shimatani | 2012-03-13 |
| 6184687 | Plasma process end point determination method and apparatus, and plasma evaluation method and apparatus | Hiroyuki Takada, Takeshi Yamauchi | 2001-02-06 |
| 6059922 | Plasma processing apparatus and a plasma processing method | Osamu Yamazaki, Shigeyuki Takagi, Kaoru Taki, Noboru Okamoto, Yutaka Uchida +1 more | 2000-05-09 |
| 5955382 | Microwave excitation plasma processing apparatus and microwave excitation plasma processing method | Takeshi Yamauchi, Katsuaki Aoki | 1999-09-21 |