Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12365976 | Film forming apparatus | Shigeki Matsunaka, Yoji Takizawa, Hiroshi Ootsuka | 2025-07-22 |
| 11355337 | Substrate treatment device and substrate treatment method | Masaya KAMIYA, Kensuke Demura, Daisuke Matsushima, Haruka Nakano | 2022-06-07 |
| 10734217 | Substrate treatment device and substrate treatment method | Masaya KAMIYA, Kensuke Demura, Daisuke Matsushima, Haruka Nakano | 2020-08-04 |
| 8133348 | Plasma generating apparatus and plasma treatment apparatus | Yoshikazu Tsugami, Kohei Shimatani, Masashi Yamage | 2012-03-13 |