Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165886 | Substrate processing apparatus and substrate processing method | Kensuke Demura, Masaya KAMIYA | 2024-12-10 |
| 12138671 | Substrate treatment device | Minami NAKAMURA, Kensuke Demura | 2024-11-12 |
| 12109597 | Substrate treatment device | Kensuke Demura, Satoshi Nakamura, Masaya KAMIYA, Minami NAKAMURA | 2024-10-08 |
| 12097541 | Substrate processing apparatus | Kensuke Demura, Masaya KAMIYA | 2024-09-24 |
| 12005482 | Substrate treatment device | Kensuke Demura, Masaya KAMIYA | 2024-06-11 |
| 11784040 | Substrate treatment device | Kensuke Demura, Masaya KAMIYA | 2023-10-10 |
| 11609491 | Reflective mask cleaning apparatus and reflective mask cleaning method | Kensuke Demura, Masafumi Suzuki, Satoshi Nakamura | 2023-03-21 |
| 11355337 | Substrate treatment device and substrate treatment method | Masaya KAMIYA, Kensuke Demura, Haruka Nakano, Ivan Petrov Ganachev | 2022-06-07 |
| 10773425 | Imprint template manufacturing apparatus and imprint template manufacturing method | Kensuke Demura, Satoshi Nakamura, Masayuki Hatano, Hiroyuki Kashiwagi | 2020-09-15 |
| 10734217 | Substrate treatment device and substrate treatment method | Masaya KAMIYA, Kensuke Demura, Haruka Nakano, Ivan Petrov Ganachev | 2020-08-04 |
| 10668496 | Imprint template treatment apparatus | Satoshi Nakamura, Kensuke Demura, Masayuki Hatano, Hiroyuki Kashiwagi | 2020-06-02 |
| 9586391 | Bonding apparatus and method for manufacturing bonded substrate | Konosuke Hayashi | 2017-03-07 |