Issued Patents All Time
Showing 1–25 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12271111 | Template, manufacturing method of template, and manufacturing method of semiconductor device | Takahiro Iwasaki, Hirokazu Miyoshi, Shogo Aso | 2025-04-08 |
| 12072622 | Imprint method, method of manufacturing semiconductor device, and imprint device | Hirokazu Miyoshi | 2024-08-27 |
| 11953825 | Imprint apparatus, imprint method, and manufacturing method of semiconductor device | Kei Kobayashi, Tetsuro Nakasugi | 2024-04-09 |
| 11837469 | Imprint apparatus, imprint method, and method of manufacturing semiconductor device | Kazuya Fukuhara, Tetsuro Nakasugi | 2023-12-05 |
| 11333969 | Imprint apparatus, imprint method, and article manufacturing method | Keiji Yamashita, Yutaka Watanabe, Takuya Kono, Ikuo Yoneda | 2022-05-17 |
| 11004683 | Imprint apparatus, imprint method, and method of manufacturing semiconductor device | Kazuya Fukuhara, Tetsuro Nakasugi | 2021-05-11 |
| 10773425 | Imprint template manufacturing apparatus and imprint template manufacturing method | Kensuke Demura, Satoshi Nakamura, Daisuke Matsushima, Hiroyuki Kashiwagi | 2020-09-15 |
| 10668496 | Imprint template treatment apparatus | Satoshi Nakamura, Kensuke Demura, Daisuke Matsushima, Hiroyuki Kashiwagi | 2020-06-02 |
| 10168615 | Imprint apparatus, imprint method, and article manufacturing method | Keiji Yamashita, Yutaka Watanabe, Takuya Kono, Ikuo Yoneda | 2019-01-01 |
| 10118317 | Template and pattern formation method | Yoshihisa Kawamura, Yohko Komatsu, Hiroyuki Kashiwagi | 2018-11-06 |
| 9885118 | Template forming method, template, and template base material | Masatoshi Tsuji, Yohko Komatsu, Tetsuro Nakasugi | 2018-02-06 |
| RE46390 | Pattern forming method, processing method, and processing apparatus | Masafumi Asano, Ryoichi Inanami | 2017-05-02 |
| 9377777 | Fine processing method, fine processing apparatus, and recording medium with fine processing program recorded thereon | Yasutada Nakagawa, Takuya Kono, Ikuo Yoneda | 2016-06-28 |
| 9360752 | Pattern formation method | Masatoshi Tsuji, Tetsuro Nakasugi | 2016-06-07 |
| 8973494 | Imprint method and imprint apparatus | Ikuo Yoneda, Tetsuro Nakasugi, Kenji Ooki | 2015-03-10 |
| 8906281 | Imprint method, imprinting equipment, and method for manufacturing semiconductor device | Takumi Ota, Yohko FURUTONO | 2014-12-09 |
| 8901012 | Semiconductor manufacturing apparatus and method for manufacturing semiconductor device | Hiroshi TOKUE | 2014-12-02 |
| 8772179 | Pattern forming method, pattern forming apparatus, and method for manufacturing semiconductor device | Kazuya Fukuhara | 2014-07-08 |
| 8691123 | Fine processing method, fine processing apparatus, and recording medium with fine processing program recorded thereon | Yasutada Nakagawa, Takuya Kono, Ikuo Yoneda | 2014-04-08 |
| 8550801 | Imprint apparatus and method | Yohko FURUTONO, Shinji Mikami, Tetsuro Nakasugi | 2013-10-08 |
| 8420422 | Pattern forming method, processing method, and processing apparatus | Masafumi Asano, Ryoichi Inanami | 2013-04-16 |
| 8180472 | Control method for semiconductor manufacturing apparatus, control system for semiconductor manufacturing apparatus, and manufacturing method for semiconductor device | Tetsuro Nakasugi | 2012-05-15 |
| 8118585 | Pattern formation method and a method for manufacturing a semiconductor device | Suigen Kyoh, Tetsuro Nakasugi | 2012-02-21 |
| 7906258 | Photomask, photomask superimposition correcting method, and manufacturing method of semiconductor device | Nobuhiro Komine, Kazutaka Ishigo, Noriaki Sasaki | 2011-03-15 |
| 6773626 | Reversible information display medium of liquid crystal type and non-contact IC card utilizing the same | Satoshi Sanada | 2004-08-10 |