Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9941177 | Pattern accuracy detecting apparatus and processing system | Kentaro Kasa, Kazuya Fukuhara, Manabu Takakuwa, Yoshinori Hagio, Kazuhiro Segawa +4 more | 2018-04-10 |
| 9250542 | Overlay/alignment measurement method and overlay/alignment measurement apparatus | — | 2016-02-02 |
| 9158212 | Exposure apparatus, exposure control system, and exposure method | — | 2015-10-13 |
| 8790851 | Mask and method for fabricating semiconductor device | Yosuke Okamoto, Taketo Kuriyama | 2014-07-29 |
| 8364437 | Mark arrangement inspecting method, mask data, and manufacturing method of semiconductor device | Hiroyuki Morinaga, Takaki Kumanomido | 2013-01-29 |
| 8072601 | Pattern monitor mark and monitoring method suitable for micropattern | Kazuya Fukuhara | 2011-12-06 |
| 8034515 | Pattern forming method, pattern designing method, and mask set | — | 2011-10-11 |
| 7973419 | Semiconductor device and method of fabricating the same | Tomoyasu Kudo | 2011-07-05 |
| 7906258 | Photomask, photomask superimposition correcting method, and manufacturing method of semiconductor device | Nobuhiro Komine, Noriaki Sasaki, Masayuki Hatano | 2011-03-15 |