Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9165091 | Recipe management apparatus and recipe management method | Kenichi Tsujisawa | 2015-10-20 |
| 8392855 | Transferring pattern onto semiconductor substrate using optimum transfer condition determined for each divided area | Ryoichi Inanami | 2013-03-05 |
| 8364437 | Mark arrangement inspecting method, mask data, and manufacturing method of semiconductor device | Kazutaka Ishigo, Takaki Kumanomido | 2013-01-29 |
| 7847270 | Semiconductor manufacturing apparatus and method thereof | Takema Ito, Arata Inoue | 2010-12-07 |
| 7512501 | Defect inspecting apparatus for semiconductor wafer | Atsushi Onishi, Masayoshi Yamasaki, Takema Ito, Yasuhiro Kaga | 2009-03-31 |
| 7271808 | Image display control method and image display control apparatus | Seiichi Moriyama, Naoto Osaka, Takashi Koizumi, Hiroyuki Kageyama, Noriko Kaku +1 more | 2007-09-18 |
| 7260443 | System and program for making recipe and method for manufacturing products by using recipe | Takema Ito, Arata Inoue, Takuya Kono, Takashi Sakamoto | 2007-08-21 |
| 7239934 | System and method for delivering writing data of a semiconductor device and fabricating a semiconductor device | Takema Ito | 2007-07-03 |
| 6721935 | Coordinate transformation system for semiconductor device, coordinate transformation method and coordinate transformation program | — | 2004-04-13 |