Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9165091 | Recipe management apparatus and recipe management method | Hiroyuki Morinaga | 2015-10-20 |
| 8836919 | Management method and system for exposure apparatus having alarm based on inclination amount and deviation from aligned position | Hiroshi Matsushita, Takayoshi Otake, Hideyuki Oishi, Akira Ogawa, Koji Washiyama | 2014-09-16 |