Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8836919 | Management method and system for exposure apparatus having alarm based on inclination amount and deviation from aligned position | Kenichi Tsujisawa, Hiroshi Matsushita, Hideyuki Oishi, Akira Ogawa, Koji Washiyama | 2014-09-16 |