Issued Patents All Time
Showing 1–25 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE48815 | Method of designing a template pattern, method of manufacturing a template and method of manufacturing a semiconductor device | Hiroshi TOKUE, Ikuo Yoneda | 2021-11-09 |
| RE47271 | Imprint recipe creating device and imprint device | Shinji Mikami | 2019-03-05 |
| RE47093 | Imprint pattern forming method | Hiroshi TOKUE, Ikuo Yoneda | 2018-10-23 |
| RE46901 | Drop recipe creating method, database creating method and medium | Yasuo Matsuoka, Takumi Ota | 2018-06-19 |
| 9957630 | Pattern transfer mold and pattern formation method | Yongfang Li, Akiko Mimotogi, Takashi Sato, Masato Saito, Koichi Kokubun | 2018-05-01 |
| RE46390 | Pattern forming method, processing method, and processing apparatus | Masafumi Asano, Masayuki Hatano | 2017-05-02 |
| RE46191 | Imprint pattern forming method | Hiroshi TOKUE, Ikuo Yoneda | 2016-11-01 |
| 9329490 | Pattern formation method, mask for exposure, and exposure apparatus | Takashi Sato, Shinichi Ito, Satoshi Tanaka | 2016-05-03 |
| 9188879 | Substrate holding apparatus, pattern transfer apparatus, and pattern transfer method | Kentaro Kasa, Manabu Takakuwa, Kazuto Matsuki, Tetsuro Nakasugi, Hiroshi Koizumi +1 more | 2015-11-17 |
| 9021983 | Stage apparatus and process apparatus | Shinichi Ito, Hiroshi Koizumi, Akihiro Kojima | 2015-05-05 |
| 8740377 | Imprint recipe creating device and imprint device | Shinji Mikami | 2014-06-03 |
| 8728711 | Cleaning reticle, method for cleaning reticle stage, and method for manufacturing semiconductor device | Yumi Nakajima, Suigen Kyoh | 2014-05-20 |
| 8647106 | Template and method of manufacturing a semiconductor device | Shinji Mikami, Takuya Kono | 2014-02-11 |
| 8560977 | Drop recipe creating method, database creating method and medium | Yasuo Matsuoka, Takumi Ota | 2013-10-15 |
| 8468480 | Method of designing a template pattern, method of manufacturing a template and method of manufacturing a semiconductor device | Hiroshi TOKUE, Ikuo Yoneda | 2013-06-18 |
| 8444889 | Imprint pattern forming method | Hiroshi TOKUE, Ikuo Yoneda | 2013-05-21 |
| 8420422 | Pattern forming method, processing method, and processing apparatus | Masafumi Asano, Masayuki Hatano | 2013-04-16 |
| 8392855 | Transferring pattern onto semiconductor substrate using optimum transfer condition determined for each divided area | Hiroyuki Morinaga | 2013-03-05 |
| 8227267 | Template inspection method and manufacturing method for semiconductor device | Ikuo Yoneda, Tetsuro Nakasugi, Masamitsu Itoh | 2012-07-24 |
| 8227151 | Flare correction method, method for manufacturing mask for lithography, and method for manufacturing semiconductor device | Suigen Kyoh | 2012-07-24 |
| 8071263 | Reflective mask and manufacturing method for reflective mask | Yumi Nakajima, Masamitsu Itoh | 2011-12-06 |
| 7972932 | Mark forming method and method for manufacturing semiconductor device | Takashi Sato, Hiroko Nakamura, Masaru Suzuki | 2011-07-05 |
| 7914958 | Semiconductor device manufacturing method | Shinji Mikami, Hirofumi Inoue | 2011-03-29 |
| 7683352 | Electron beam writing data creating method and electron beam writing data creating apparatus | — | 2010-03-23 |
| 7459705 | Charged particle beam exposure method of character projection system, charged particle beam exposure device of character projection system, program for use in charged particle beam exposure device, and manufacturing method of semiconductor device | Tetsuro Nakasugi, Takumi Ota, Takeshi Koshiba | 2008-12-02 |