Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7449700 | Electron beam exposure apparatus, electron beam exposure method and method of manufacturing semiconductor device | — | 2008-11-11 |
| 7368737 | Electron beam writing method, electron beam writing apparatus and semiconductor device manufacturing method | Tetsuro Nakasugi | 2008-05-06 |
| 7301161 | Method of producing electron beam writing data, program of producing electron beam writing data, and electron beam writing apparatus | — | 2007-11-27 |
| 7102147 | Charged particle beam exposure method and method for producing charged particle beam exposure data | Shunko Magoshi, Atsushi Ando | 2006-09-05 |
| 7079994 | Method and system for producing semiconductor devices | Shunko Magoshi, Katsuya Okumura | 2006-07-18 |
| 6756159 | Method of preparing exposure data and method of preparing aperture mask data | — | 2004-06-29 |
| 6718532 | Charged particle beam exposure system using aperture mask in semiconductor manufacture | Shunko Magoshi, Atsushi Ando | 2004-04-06 |
| 6560768 | Circuit pattern design method, circuit pattern design system, and recording medium | Shunko Magoshi, Shouhei Kousai | 2003-05-06 |
| 6543044 | Method of extracting characters and computer-readable recording medium | Shunko Magoshi | 2003-04-01 |
| 6481004 | Circuit pattern design method, exposure method, charged-particle beam exposure system | Shunko Magoshi | 2002-11-12 |