Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12106403 | Center shift amount estimating apparatus, method, and program | — | 2024-10-01 |
| 11885754 | Tolerance error estimating apparatus, method, program, reconstruction apparatus and control apparatus | — | 2024-01-30 |
| RE46901 | Drop recipe creating method, database creating method and medium | Yasuo Matsuoka, Ryoichi Inanami | 2018-06-19 |
| 9437414 | Pattern forming device and semiconductor device manufacturing method | — | 2016-09-06 |
| 9216539 | Imprinting apparatus, imprinting method, and manufacturing method of uneven plate | — | 2015-12-22 |
| 9108343 | Template treatment method | — | 2015-08-18 |
| 8906281 | Imprint method, imprinting equipment, and method for manufacturing semiconductor device | Masayuki Hatano, Yohko FURUTONO | 2014-12-09 |
| 8826847 | Imprinting apparatus, imprinting method, and manufacturing method of uneven plate | — | 2014-09-09 |
| 8560977 | Drop recipe creating method, database creating method and medium | Yasuo Matsuoka, Ryoichi Inanami | 2013-10-15 |
| 8368018 | Method and apparatus for charged particle beam inspection | Masahiro Hatakeyama | 2013-02-05 |
| 8221827 | Patterning method | Hiroshi TOKUE, Ikuo Yoneda, Shinji Mikami | 2012-07-17 |
| 8142694 | Method for forming an imprint pattern | Hiroshi TOKUE | 2012-03-27 |
| 7985958 | Electron beam drawing apparatus, deflection amplifier, deflection control device, electron beam drawing method, method of manufacturing semiconductor device, and electron beam drawing program | Tetsuro Nakasugi, Kazuo Tawarayama, Hiroyuki Mizuno, Noriaki Sasaki, Tatsuhiko Higashiki +2 more | 2011-07-26 |
| 7889910 | Character pattern extracting method, charged particle beam drawing method, and character pattern extracting program | Tetsuro Nakasugi, Takeshi Koshiba, Noriaki Sasaki | 2011-02-15 |
| 7482604 | Electron beam lithography apparatus, lithography method, lithography program, and manufacturing method of a semiconductor device | Tetsuro Nakasugi, Noriaki Sasaki, Takeshi Koshiba | 2009-01-27 |
| 7459705 | Charged particle beam exposure method of character projection system, charged particle beam exposure device of character projection system, program for use in charged particle beam exposure device, and manufacturing method of semiconductor device | Tetsuro Nakasugi, Ryoichi Inanami, Takeshi Koshiba | 2008-12-02 |
| 7435978 | System, method and a program for correcting conditions for controlling a charged particle beam for lithography and observation, and a program and method for manufacturing a semiconductor device | Tetsuro Nakasugi | 2008-10-14 |
| 7242014 | Charged particle beam drawing equipment, method of adjusting aperture mask, and method of manufacturing semiconductor device | Tetsuro Nakasugi | 2007-07-10 |
| 7202488 | Correction system, method of correcting deflection distortion, program and method for manufacturing a semiconductor device | Tetsuro Nakasugi | 2007-04-10 |
| RE39491 | Optical disk vibration sensing and reproducing device | Akihiro Kishishita, Kiyoshi Kodani, Masayuki Hayashida | 2007-02-20 |
| 6081491 | Optical disk vibration sensing and reproducing device | Akihiro Kishishita, Kiyoshi Kodani, Masayuki Hayashida | 2000-06-27 |
| 6009053 | Optical disk vibration sensing and reproducing device | Akihiro Kishishita, Kiyoshi Kodani, Masayuki Hayashida | 1999-12-28 |
| 5886966 | Optical disk vibration sensing and reproducing device | Akihiro Kishishita, Kiyoshi Kodani, Masayuki Hayashida | 1999-03-23 |