Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12414345 | Manufacturing method of semiconductor device and semiconductor wafer | Hitoshi Fujioka, Norihiro Togawa, Takuji ARAUCHI | 2025-09-09 |
| 9389513 | Method of forming pattern, system for calculating resist coating distribution and program for calculating the same | — | 2016-07-12 |
| 9381540 | Pattern forming method | Ikuo Yoneda, Tetsuro Nakasugi | 2016-07-05 |
| 9046763 | Pattern forming method | Ikuo Yoneda, Tetsuro Nakasugi | 2015-06-02 |
| 8907346 | Imprint apparatus, imprint method, and manufacturing method of semiconductor device | Nobuhiro Komine | 2014-12-09 |
| 8423926 | Acceptance determining method of blank for EUV mask and manufacturing method of EUV mask | Hidefumi Mukai, Seiro Miyoshi, Kazunori Iida | 2013-04-16 |
| 8178366 | Pattern forming method, manufacturing method of semiconductor device, and template manufacturing method | Seiro Miyoshi, Hidefumi Mukai | 2012-05-15 |
| 7985958 | Electron beam drawing apparatus, deflection amplifier, deflection control device, electron beam drawing method, method of manufacturing semiconductor device, and electron beam drawing program | Tetsuro Nakasugi, Kazuo Tawarayama, Hiroyuki Mizuno, Takumi Ota, Noriaki Sasaki +2 more | 2011-07-26 |
| 7889910 | Character pattern extracting method, charged particle beam drawing method, and character pattern extracting program | Tetsuro Nakasugi, Takumi Ota, Noriaki Sasaki | 2011-02-15 |
| 7482604 | Electron beam lithography apparatus, lithography method, lithography program, and manufacturing method of a semiconductor device | Tetsuro Nakasugi, Noriaki Sasaki, Takumi Ota | 2009-01-27 |
| 7459705 | Charged particle beam exposure method of character projection system, charged particle beam exposure device of character projection system, program for use in charged particle beam exposure device, and manufacturing method of semiconductor device | Tetsuro Nakasugi, Ryoichi Inanami, Takumi Ota | 2008-12-02 |
| 7257224 | Cryptographical pseudo-random number generation apparatus and program | — | 2007-08-14 |
| 6330539 | Dialog interface system | Kuniharu Takayama, Masahiro Matsuoka, Shinya Hosogi, Minoru Sekiguchi, Yoshiharu Maeda +1 more | 2001-12-11 |
| 6040840 | Virtual clay system and its method of simulation | Masahiro Matsuoka, Kuniharu Takayama | 2000-03-21 |
| 5787426 | Data sorting, data sorting tree creating, derivative extracting and thesaurus creating apparatus and method, or data processing system | Yasubumi Sakakibara | 1998-07-28 |