Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12068301 | Semiconductor device and method of manufacturing the same | Jun Iijima | 2024-08-20 |
| 11652094 | Semiconductor device and method of manufacturing the same | Jun Iijima | 2023-05-16 |
| 11647630 | Semiconductor memory device | — | 2023-05-09 |
| 11462562 | Semiconductor device | Satoshi Nagashima | 2022-10-04 |
| 11302684 | Semiconductor device and method of manufacturing the same | Jun Iijima | 2022-04-12 |
| 11088162 | Semiconductor memory device and semiconductor device manufacturing method | Kotaro Fujii, Satoshi Nagashima | 2021-08-10 |
| 10877375 | Reflection type exposure mask and pattern forming method | — | 2020-12-29 |
| 10600771 | Semiconductor device and method of manufacturing the same | Jun Iijima | 2020-03-24 |
| 9418887 | Method of manufacturing semiconductor device | — | 2016-08-16 |
| 9209052 | Semiconductor manufacturing apparatus and device manufacturing method using substrate distortion correction | Kentaro Matsunaga, Eiji Yoneda | 2015-12-08 |
| 9153456 | Pattern forming method using block copolymers | Kentaro Matsunaga | 2015-10-06 |
| 8728711 | Cleaning reticle, method for cleaning reticle stage, and method for manufacturing semiconductor device | Suigen Kyoh, Ryoichi Inanami | 2014-05-20 |
| 8187773 | Method for generating mask pattern data and method for manufacturing mask | Masaru Suzuki, Takashi Sato | 2012-05-29 |
| 8071263 | Reflective mask and manufacturing method for reflective mask | Ryoichi Inanami, Masamitsu Itoh | 2011-12-06 |