Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10068915 | Manufacturing method for a semiconductor device including resist films different in thickness | Satoshi Nagai, Kentaro Matsunaga, Koutarou Sho | 2018-09-04 |
| 9465295 | Pattern forming method | Kentaro Matsunaga, Masashi Terao | 2016-10-11 |
| 9348226 | Radiation-sensitive resin composition | Isao Nishimura, Kouichi Fujiwara, Eiichi Kobayashi, Tsutomu Shimokawa, Atsushi Nakamura +1 more | 2016-05-24 |
| 9349585 | Pattern formation method | Sonoe Nakaoka, Kentaro Matsunaga | 2016-05-24 |
| 9260300 | Pattern formation method and pattern formation apparatus | Kentaro Matsunaga, Nobuhiro Komine | 2016-02-16 |
| 9209052 | Semiconductor manufacturing apparatus and device manufacturing method using substrate distortion correction | Yumi Nakajima, Kentaro Matsunaga | 2015-12-08 |
| 8597867 | Lactone copolymer and radiation-sensitive resin composition | Hiromitsu Nakashima, Tomohiro Utaka, Takashi Chiba, Atsushi Nakamura | 2013-12-03 |
| 7897821 | Sulfonium compound | Tomoki Nagai, Takuma Ebata, Takanori Kawakami, Makoto Sugiura, Tsutomu Shimokawa +1 more | 2011-03-01 |
| 7812105 | Compound, polymer, and radiation-sensitive composition | Tomoki Nagai, Takuma Ebata, Takanori Kawakami, Makoto Sugiura, Tsutomu Shimokawa +1 more | 2010-10-12 |
| 7314701 | Radiation-sensitive resin composition | Kenichi Yokoyama, Fumihisa Miyajima, Tomoki Nagai | 2008-01-01 |
| 7217492 | Onium salt compound and radiation-sensitive resin composition | Yong Wang, Yukio Nishimura | 2007-05-15 |
| 6908722 | Acid generator, sulfonic acid, sulfonic acid derivatives and radiation-sensitive resin composition | Satoshi Ebata, Tomoki Nagai, Tatsuya Toneri, Yong Wang, Haruo Iwasawa +1 more | 2005-06-21 |
| 6824954 | Sulfonyloxime compound, and radiation sensitive acid generator, positive type radiation sensitive resin composition and negative type radiation sensitive resin composition using same | Tatsuya Toneri, Yong Wang, Tsutomu Shimokawa | 2004-11-30 |
| 6272203 | X-ray fluorescence inspection apparatus | Yasuhisa Asano | 2001-08-07 |
| 6103996 | Method for producing a fuel rod | Mitsuteru Sugano | 2000-08-15 |
| 6014418 | Fuel rod for light water reactor and method for manufacturing the same | Takeshi Isobe, Yoshiharu Mae, Toshimichi Takahashi, Yoshitaka Suda, Akio Sando | 2000-01-11 |
| 5968375 | Method for welding and apparatus therefor | — | 1999-10-19 |
| 5912935 | Fuel rod for light water reactor and method for manufacturing the same | Takeshi Isobe, Yoshiharu Mae, Toshimichi Takahashi, Yoshitaka Suda, Akio Sando | 1999-06-15 |
| 5401933 | Method for welding of end plug of control rod | — | 1995-03-28 |
| 5374800 | Method for welding of fuel rod | — | 1994-12-20 |
| 5319178 | Welding apparatus for fuel rod end plugs | Akio Sando, Minoru Murata | 1994-06-07 |
| 5031893 | Device for turning over printed sheets | Kazuhito Murata | 1991-07-16 |