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Composition for forming silicon-cobalt film, silicon-cobalt film and method for forming same |
Yasuo Matsuki, Daohai Wang, Tatsuya Sakai |
2010-05-18 |
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Composition for forming silicon film and method for forming silicon film |
Yasuo Matsuki, Hitoshi Kato |
2009-01-06 |
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Radiation-sensitive resin composition |
Akihiro Hayashi, Tsutomu Shimokawa |
2007-10-30 |
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Pattern forming method and bilayer film |
Akihiro Hayashi, Tsutomu Shimokawa, Kazuo Kawaguchi, Masato Tanaka |
2007-07-17 |
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High order silane composition, and method of forming silicon film using the composition |
Takashi Aoki, Masahiro Furusawa, Yasuo Matsuki, Yasumasa Kateuchi |
2007-05-29 |
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Polysiloxane, process for production thereof and radiation-sensitive resin composition |
Akihiro Hayashi, Tsutomu Shimokawa, Masafumi Yamamoto |
2006-09-19 |
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Acid generator, sulfonic acid, sulfonic acid derivatives and radiation-sensitive resin composition |
Satoshi Ebata, Eiji Yoneda, Tomoki Nagai, Tatsuya Toneri, Yong Wang +1 more |
2005-06-21 |
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Polysiloxane, method of manufacturing same, silicon-containing alicyclic compound, and radiation-sensitive resin composition |
Tsutomu Shimokawa, Akihiro Hayashi, Satoru Nishiyama |
2005-01-25 |
| 6531260 |
Polysiloxane, method of manufacturing same, silicon-containing alicyclic compound, and radiation-sensitive resin composition |
Tsutomu Shimokawa, Akihiro Hayashi, Satoru Nishiyama |
2003-03-11 |
| 6403280 |
Radiation sensitive resin composition |
Noboru Yamahara, Kiyoshi Murata, Shinichiro Iwanaga, Hiroyuki Ishii |
2002-06-11 |
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Radiation sensitive resin composition |
Mitsuhito Suwa, Toru Kajita, Shin-ichiro Iwanaga |
2001-11-27 |
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Radiation sensitive resin composition |
Mitsuhito Suwa, Toru Kajita, Shin-ichiro Iwanaga |
2001-02-13 |
| 6180316 |
Radiation sensitive resin composition |
Toru Kajita, Mitsuhito Suwa, Masafumi Yamamoto |
2001-01-30 |