Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7718228 | Composition for forming silicon-cobalt film, silicon-cobalt film and method for forming same | Yasuo Matsuki, Daohai Wang, Tatsuya Sakai | 2010-05-18 |
| 7473443 | Composition for forming silicon film and method for forming silicon film | Yasuo Matsuki, Hitoshi Kato | 2009-01-06 |
| 7288359 | Radiation-sensitive resin composition | Akihiro Hayashi, Tsutomu Shimokawa | 2007-10-30 |
| 7244549 | Pattern forming method and bilayer film | Akihiro Hayashi, Tsutomu Shimokawa, Kazuo Kawaguchi, Masato Tanaka | 2007-07-17 |
| 7223802 | High order silane composition, and method of forming silicon film using the composition | Takashi Aoki, Masahiro Furusawa, Yasuo Matsuki, Yasumasa Kateuchi | 2007-05-29 |
| 7108955 | Polysiloxane, process for production thereof and radiation-sensitive resin composition | Akihiro Hayashi, Tsutomu Shimokawa, Masafumi Yamamoto | 2006-09-19 |
| 6908722 | Acid generator, sulfonic acid, sulfonic acid derivatives and radiation-sensitive resin composition | Satoshi Ebata, Eiji Yoneda, Tomoki Nagai, Tatsuya Toneri, Yong Wang +1 more | 2005-06-21 |
| 6846895 | Polysiloxane, method of manufacturing same, silicon-containing alicyclic compound, and radiation-sensitive resin composition | Tsutomu Shimokawa, Akihiro Hayashi, Satoru Nishiyama | 2005-01-25 |
| 6531260 | Polysiloxane, method of manufacturing same, silicon-containing alicyclic compound, and radiation-sensitive resin composition | Tsutomu Shimokawa, Akihiro Hayashi, Satoru Nishiyama | 2003-03-11 |
| 6403280 | Radiation sensitive resin composition | Noboru Yamahara, Kiyoshi Murata, Shinichiro Iwanaga, Hiroyuki Ishii | 2002-06-11 |
| 6322949 | Radiation sensitive resin composition | Mitsuhito Suwa, Toru Kajita, Shin-ichiro Iwanaga | 2001-11-27 |
| 6187504 | Radiation sensitive resin composition | Mitsuhito Suwa, Toru Kajita, Shin-ichiro Iwanaga | 2001-02-13 |
| 6180316 | Radiation sensitive resin composition | Toru Kajita, Mitsuhito Suwa, Masafumi Yamamoto | 2001-01-30 |