Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7512501 | Defect inspecting apparatus for semiconductor wafer | Hiroyuki Morinaga, Atsushi Onishi, Masayoshi Yamasaki, Takema Ito | 2009-03-31 |
| 5576542 | Substrate cross-section observing apparatus | — | 1996-11-19 |
| 5302829 | Automatic focusing method for scanning electron microscopy | Fumio Komatsu | 1994-04-12 |
| 5161201 | Method of and apparatus for measuring pattern profile | Kei Hattori, Isahiro Hasegawa, Fumio Komatsu | 1992-11-03 |
| 5159643 | Method and apparatus for measuring pattern dimension | Fumio Komatsu | 1992-10-27 |