Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6515296 | Pattern dimension measuring system and pattern dimension measuring method | Motosuke Miyoshi, Katsuya Okumura | 2003-02-04 |
| 6363167 | Method for measuring size of fine pattern | Yumiko Miyano | 2002-03-26 |
| 6187488 | Pattern estimating method and pattern forming method | Kei Hayasaki, Shinichi Ito | 2001-02-13 |
| 6114681 | Automatic focus control method and automatic focus control system having in focus and out of focus states detection | — | 2000-09-05 |
| 6111981 | Method and apparatus for processing pattern image data by SEM | Koji Tsubusaki, Hiroshi Motoki | 2000-08-29 |
| 5887080 | Method and apparatus for processing pattern image data by SEM | Koji Tsubusaki, Hiroshi Motoki | 1999-03-23 |
| 5818217 | Electron beam irradiating apparatus and electric signal detecting apparatus | Katsuya Okumura, Motosuke Miyoshi | 1998-10-06 |
| 5811803 | Electron microscope | Hiroshi Motoki | 1998-09-22 |
| 5555319 | Critical dimension measuring method and equipment thereof | Koji Tsubusaki | 1996-09-10 |
| 5528648 | Method and apparatus for analyzing contaminative element concentrations | Kunihiro Miyazaki, Ayako Shimazaki | 1996-06-18 |
| 5497407 | Contaminating-element analyzing method | Kunihiro Miyazaki, Ayako Shimazaki | 1996-03-05 |
| 5490194 | Method and apparatus for analyzing contaminative element concentrations | Kunihiro Miyazaki, Ayako Shimazaki | 1996-02-06 |
| 5479535 | Method of extracting features of image | — | 1995-12-26 |
| 5430786 | Element analyzing method | Kunihiro Miyazaki, Ayako Shimazaki | 1995-07-04 |
| 5422925 | Contaminating-element analyzing method and apparatus of the same | Kunihiro Miyazaki, Ayako Shimazaki | 1995-06-06 |
| 5359197 | Apparatus and method of aligning electron beam of scanning electron microscope | Motosuke Miyoshi | 1994-10-25 |
| 5315119 | Electron beam irradiating apparatus and electric signal detecting apparatus | Katsuya Okumura, Motosuke Miyoshi | 1994-05-24 |
| 5302829 | Automatic focusing method for scanning electron microscopy | Yasuhiro Kaga | 1994-04-12 |
| 5247588 | Method of image restoration | — | 1993-09-21 |
| 5161201 | Method of and apparatus for measuring pattern profile | Yasuhiro Kaga, Kei Hattori, Isahiro Hasegawa | 1992-11-03 |
| 5159643 | Method and apparatus for measuring pattern dimension | Yasuhiro Kaga | 1992-10-27 |
| 5029250 | Pattern configuration measuring apparatus | Motosuke Miyoshi | 1991-07-02 |
| 4910398 | Pattern Measurement method | Katsuya Okumura | 1990-03-20 |
| 4894540 | Image forming method using secondary electrons from object for noise elimination | — | 1990-01-16 |
| 4807159 | Apparatus and method for controlling irradiation of an electron beam at a fixed position in an electron beam tester system | Motosuke Miyoshi, Katsuya Okumura | 1989-02-21 |