Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6111981 | Method and apparatus for processing pattern image data by SEM | Hiroshi Motoki, Fumio Komatsu | 2000-08-29 |
| 5887080 | Method and apparatus for processing pattern image data by SEM | Hiroshi Motoki, Fumio Komatsu | 1999-03-23 |
| 5555319 | Critical dimension measuring method and equipment thereof | Fumio Komatsu | 1996-09-10 |
| 5434409 | Critical dimension measuring method | — | 1995-07-18 |