Issued Patents All Time
Showing 1–25 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11670522 | Processing liquid generator and substrate processing apparatus using the same | Konosuke Hayashi | 2023-06-06 |
| 10406566 | Substrate processing device and substrate processing method | Jun Matsushita, Yuji Nagashima, Konosuke Hayashi | 2019-09-10 |
| 10281210 | Substrate processing apparatus and substrate processing method | Konosuke Hayashi, Takashi Ootagaki, Yuji Nagashima | 2019-05-07 |
| 9966282 | Substrate processing apparatus and substrate processing method | Kenji Minami, Yuji Nagashima, Konosuke Hayashi | 2018-05-08 |
| 8841205 | Manufacturing method and apparatus for semiconductor device | Masaki Kamimura, Takashi Shimizu | 2014-09-23 |
| 8148717 | Manufacturing method for semiconductor device and semiconductor device | Takayuki Ito, Yusuke Oshiki, Kouji Matsuo, Kenichi Yoshino, Takaharu Itani +3 more | 2012-04-03 |
| 8066020 | Substrate cleaning apparatus and substrate cleaning method | Hiroshi Tomita, Hiroaki Yamada, Hajime Onoda | 2011-11-29 |
| 7902030 | Manufacturing method for semiconductor device and semiconductor device | Takayuki Ito, Yusuke Oshiki, Kouji Matsuo, Kenichi Yoshino, Takaharu Itani +3 more | 2011-03-08 |
| 7875557 | Semiconductor substrate treating method, semiconductor component and electronic appliance | Hiroyuki Matsuo, Toshiki Nakajima | 2011-01-25 |
| 7875527 | Manufacturing method for semiconductor device and semiconductor device | Yasuhiro Ito, Kenji Takakura | 2011-01-25 |
| 7850818 | Method of manufacturing semiconductor device and cleaning apparatus | Tsuyoshi Matsumura, Yoshihiro Uozumi | 2010-12-14 |
| 7635601 | Method of manufacturing semiconductor device and cleaning apparatus | Tsuyoshi Matsumura, Yoshihiro Uozumi | 2009-12-22 |
| 7619896 | Electrical junction box | Hisanobu Yamashita | 2009-11-17 |
| 7439183 | Method of manufacturing a semiconductor device, and a semiconductor substrate | Hiroyuki Matsuo, Toshiki Nakajima | 2008-10-21 |
| 7365012 | Etching method, a method of forming a trench isolation structure, a semiconductor substrate and a semiconductor apparatus | Hiroyuki Matsuo, Toshiki Nakajima | 2008-04-29 |
| 7305275 | Material supply system in semiconductor device manufacturing plant | Soichi Nadahara, Kinya Usuda, Masaji Akahori, Sota Nakagawa, Ken Nakajima | 2007-12-04 |
| 7141120 | Manufacturing apparatus of semiconductor device having introducing section and withdrawing section | — | 2006-11-28 |
| 6832616 | Substrate treating apparatus | — | 2004-12-21 |
| 6645876 | Etching for manufacture of semiconductor devices | Mami Saito, Hiroshi Tomita, Soichi Nadahara | 2003-11-11 |
| 6444047 | Method of cleaning a semiconductor substrate | — | 2002-09-03 |
| 5868855 | Surface processing method and surface processing device for silicon substrates | Yuji Fukazawa | 1999-02-09 |
| 5792326 | Method and apparatus for generating ozone and methods of its use | Minoru Harada, Ryoichi Shinjo, Manabu Tsujimura, Rempei Nakata, Naruhiko Kaji +1 more | 1998-08-11 |
| 5794114 | Ozonizer | Minoru Harada, Ryoichi Shinjo, Manabu Tsujimura, Rempei Nakata, Naruhiko Kaji | 1998-08-11 |
| 5732120 | Fluorescent X-ray analyzing apparatus | Takashi Shoji, Tadashi Utaka, Ayako Shimazaki, Tsuyoshi Matsumura | 1998-03-24 |
| 5686314 | Surface processing method effected for total-reflection X-ray fluorescence analysis | — | 1997-11-11 |