Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10607863 | Substrate processing apparatus | Konosuke Hayashi | 2020-03-31 |
| 10325787 | Substrate processing apparatus and substrate processing method | Konosuke Hayashi, Yuji Nagashima, Akinori Iso | 2019-06-18 |
| 10281210 | Substrate processing apparatus and substrate processing method | Kunihiro Miyazaki, Konosuke Hayashi, Yuji Nagashima | 2019-05-07 |
| 10276406 | Substrate processing device and substrate processing method | Konosuke Hayashi, Masaaki Furuya, Yuji Nagashima, Atsushi Kinase, Masahiro Abe | 2019-04-30 |
| 9972513 | Device and method for treating a substrate with hydrofluoric and nitric acid | Yuki Saito, Konosuke Hayashi, Yuji Nagashima | 2018-05-15 |
| 9811096 | Liquid feeding device and substrate treating device | Konosuke Hayashi, Emi Matsui | 2017-11-07 |
| 9795999 | Substrate processing apparatus and substrate processing method | Konosuke Hayashi, Yosuke Himori | 2017-10-24 |
| 9694371 | Substrate treatment apparatus and substrate treatment method | Konosuke Hayashi | 2017-07-04 |
| 9607865 | Substrate processing device and substrate processing method | Konosuke Hayashi, Masaaki Furuya, Yuji Nagashima, Atsushi Kinase, Masahiro Abe | 2017-03-28 |
| 9553003 | Substrate processing device and substrate processing method | Konosuke Hayashi, Masaaki Furuya, Yuji Nagashima, Atsushi Kinase, Masahiro Abe | 2017-01-24 |