Issued Patents All Time
Showing 1–25 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412756 | Processing liquid supply device, substrate processing apparatus, and method for inspecting processing liquid supply device | Hiroaki Kobayashi, Hideki Mori | 2025-09-09 |
| 12347699 | Supply tank, supply device and supply system | Hiroaki Kobayashi, Hideki Mori | 2025-07-01 |
| 12318803 | Supply device and supply system | Hiroaki Kobayashi, Hideki Mori | 2025-06-03 |
| 12257595 | Processing liquid supply device, substrate processing apparatus, and processing liquid supply method | Hiroaki Kobayashi, Hideki Mori | 2025-03-25 |
| 11996310 | Substrate carrying apparatus | — | 2024-05-28 |
| 11193850 | Heater pipe gas leak detecting device and heater pipe gas leak detecting method | Masataka Yokoi, Nobuo Kobayashi, Atsushi Kinase | 2021-12-07 |
| 10483151 | Substrate transfer apparatus, substrate processing apparatus, and substrate processing method | — | 2019-11-19 |
| 10319602 | Substrate treatment method and substrate treatment apparatus | Nobuo Kobayashi, Koichi Hamada, Yoshiaki Kurokawa, Hideki Mori, Yasushi Watanabe +1 more | 2019-06-11 |
| 10276406 | Substrate processing device and substrate processing method | Konosuke Hayashi, Takashi Ootagaki, Yuji Nagashima, Atsushi Kinase, Masahiro Abe | 2019-04-30 |
| 9922861 | Substrate gripping device and substrate processing apparatus | Koichi Higuchi | 2018-03-20 |
| 9679787 | Spin treatment apparatus | — | 2017-06-13 |
| 9607865 | Substrate processing device and substrate processing method | Konosuke Hayashi, Takashi Ootagaki, Yuji Nagashima, Atsushi Kinase, Masahiro Abe | 2017-03-28 |
| 9553003 | Substrate processing device and substrate processing method | Konosuke Hayashi, Takashi Ootagaki, Yuji Nagashima, Atsushi Kinase, Masahiro Abe | 2017-01-24 |
| 9454080 | Spin treatment apparatus | — | 2016-09-27 |
| 9330948 | Heater unit, fan filter unit, and substrate processing apparatus | Munenori Iwami, Takahiko Wakatsuki, Masanori Kondo, Katsuya Yamada | 2016-05-03 |
| 9199805 | Processing system and processing method | Toyoyasu Tauchi | 2015-12-01 |
| 8998561 | Gripping device, transfer device, processing device, and manufacturing method for electronic device | — | 2015-04-07 |
| 8449710 | Sheet peeling machine and method for manufacturing display device | Tomohiro Matsui | 2013-05-28 |
| 7510898 | Method of manufacturing image display device and method of dividing device | Takeshi Miyachi | 2009-03-31 |
| 7015296 | Preparation of linear organosiloxane polymers | Hiroshi Nakayama, Masao Maruyama, Hiromi Nakabayashi, Tetsuo Nakanishi | 2006-03-21 |
| 6768018 | Preparation of organohalosilanes | Hajime Ishizaka, Mikio Aramata | 2004-07-27 |
| 6686312 | Metallic copper catalyst and process for making organohalosilanes | Mikio Aramata, Yoshihiro Shirota, Akio Muraida, Susumu Ueno, Toshio Shinohara | 2004-02-03 |
| 6365766 | Metallic copper catalyst and process for the synthesis of organohalosilanes | Mikio Aramata, Yoshihiro Shirota, Akio Muraida, Susumu Ueno, Toshio Shinohara | 2002-04-02 |
| 6325382 | Non-contact type mechanical seal | Yasutaka Iwamoto, Masahito Ikehara, Yoshimitsu Sekiya | 2001-12-04 |
| 6225490 | Continuous hydrolysis of organochlorosilanes | Hiroshi Nakayama, Naoyuki Ida, Hiroyuki Kobayashi, Yukinori Satoh, Yoshihiro Shirota | 2001-05-01 |