Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9330948 | Heater unit, fan filter unit, and substrate processing apparatus | Masaaki Furuya, Munenori Iwami, Masanori Kondo, Katsuya Yamada | 2016-05-03 |
| 8517035 | Processing apparatus and method | Naoya Hayamizu, Hiroshi Fujita, Akiko Saito, Toshihide Hayashi, Yukinobu Nishibe | 2013-08-27 |
| 8141567 | Apparatus and method for photoresist removal processing | Naoya Hayamizu, Hiroshi Fujita, Akiko Saito, Toshihide Hayashi, Yukinobu Nishibe +1 more | 2012-03-27 |