Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11906246 | Organic film forming apparatus | Akinori Iso, Keigo Oomori, Takashi Takahashi | 2024-02-20 |
| 8517035 | Processing apparatus and method | Takahiko Wakatsuki, Naoya Hayamizu, Hiroshi Fujita, Akiko Saito, Toshihide Hayashi | 2013-08-27 |
| 8141567 | Apparatus and method for photoresist removal processing | Takahiko Wakatsuki, Naoya Hayamizu, Hiroshi Fujita, Akiko Saito, Toshihide Hayashi +1 more | 2012-03-27 |
| 6363950 | Apparatus for processing substrate using process solutions having desired mixing ratios | Akinori Iso | 2002-04-02 |
| 6299697 | Method and apparatus for processing substrate | Akinori Iso | 2001-10-09 |