Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9612205 | Etching amount measurement apparatus for dry etching apparatus | Ganachev IvanPetrov | 2017-04-04 |
| 9330948 | Heater unit, fan filter unit, and substrate processing apparatus | Masaaki Furuya, Takahiko Wakatsuki, Masanori Kondo, Katsuya Yamada | 2016-05-03 |
| 8475870 | Resin layer formation method, resin layer formation device, disk and disk manufacturing method | Tomokazu Ito, Hisashi Nishigaki, Tsukasa Kawakami, Haruka Narita, Yoji Takizawa +1 more | 2013-07-02 |
| 8220410 | Resin layer formation method, resin layer formation device, disk, and disk manufacturing method | Tomokazu Ito, Hisashi Nishigaki, Tsukasa Kawakami, Haruka Narita, Yoji Takizawa +1 more | 2012-07-17 |
| 8088438 | Resin layer formation method, resin layer formation device, and disk manufacturing method | Tomokazu Ito, Hisashi Nishigaki, Tsukasa Kawakami, Haruka Narita, Yoji Takizawa +1 more | 2012-01-03 |
| 4693777 | Apparatus for producing semiconductor devices | Shigeki Hazano, Masahiro Shibagaki, Hidetaka Jyo, Reiichiro Sensui, Noboru Suzuki | 1987-09-15 |