Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4693777 | Apparatus for producing semiconductor devices | Shigeki Hazano, Masahiro Shibagaki, Reiichiro Sensui, Munenori Iwami, Noboru Suzuki | 1987-09-15 |
| 4441974 | Magnetron sputtering apparatus | Reiji Nishikawa, Shozo Satoyama, Yoshinori Ito | 1984-04-10 |