Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8851761 | Split cage for rolling bearing and rolling bearing using the split cage | — | 2014-10-07 |
| 8770853 | Split cage for rolling bearing | — | 2014-07-08 |
| 8689960 | Torque limiter | Akihide Nagayama | 2014-04-08 |
| 8485733 | Roller bearing cage and roller bearing | — | 2013-07-16 |
| 8424663 | Torque limiter | Akihide Nagayama | 2013-04-23 |
| 8308373 | Pin type cage and method of assembling pin type cage | Junichi Kubo | 2012-11-13 |
| 7858958 | Evaluation method and fabrication method of optical element having multilayer film, exposure apparatus having the multilayer film, and device fabrication method | Akira Miyake | 2010-12-28 |
| 7544960 | Evaluation method and fabrication method of optical element having multilayer film, exposure apparatus having the multilayer film, and device fabrication method | Akira Miyake | 2009-06-09 |
| 7510898 | Method of manufacturing image display device and method of dividing device | Masaaki Furuya | 2009-03-31 |
| 7170579 | Light source unit, exposure apparatus, and device manufacturing method | Kazuki Fujimoto | 2007-01-30 |
| 6985208 | Apparatus and method for retaining mirror, and mirror exchange method | Akira Miyake | 2006-01-10 |
| 6804323 | Mask pattern magnification correction method, magnification correction apparatus, and mask structure | Akira Moriya, Shinichi Hara, Toshinobu Tokita | 2004-10-12 |
| 6463119 | Exposure method, exposure apparatus and semiconductor manufacturing apparatus | Shigeru Terashima, Yutaka Watanabe, Kazuyuki Kasumi | 2002-10-08 |
| 6381005 | Mask holding device, exposure apparatus and device manufacturing method | Kazuyuki Kasumi | 2002-04-30 |
| 6258492 | X-ray mask structure and method of making the same | — | 2001-07-10 |
| 6101237 | X-ray mask and X-ray exposure method using the same | Keiko Chiba, Hiroshi Osawa, Koichi Sentoku, Hiroshi Maehara | 2000-08-08 |
| 6078640 | X-ray exposure apparatus | Takayuki Hasegawa | 2000-06-20 |
| 6069931 | Mask structure and mask holding mechanism for exposure apparatus | Shinichi Hara | 2000-05-30 |
| 5994003 | Scanning exposure method and mask therefor | Shinichi Hara | 1999-11-30 |
| 5861603 | Mask structure and method of making the same | Hiroshi Maehara, Masatake Akaike | 1999-01-19 |
| 5854819 | Mask supporting device and correction method therefor, and exposure apparatus and device producing method utilizing the same | Shinichi Hara, Nobutoshi Mizusawa, Yuji Chiba, Kazuyuki Kasumi | 1998-12-29 |
| 5656398 | Method of making X-ray mask structure | Yasuaki Fukuda, Keiko Chiba | 1997-08-12 |
| 5600698 | X-ray exposure apparatus | Shigeru Terashima | 1997-02-04 |
| 5589304 | Photomask comprising a holding frame and reinforcing member with a ceramic oxide bond | Keiko Chiba | 1996-12-31 |
| 5585923 | Method and apparatus for measuring positional deviation while correcting an error on the basis of the error detection by an error detecting means | Noriyuki Nose, Kenji Saitoh, Koichi Sentoku, Takahiro Matsumoto | 1996-12-17 |