Issued Patents All Time
Showing 1–25 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12179231 | Planarization method and photocurable composition | Toshiki Ito, Naoki Kiyohara, Timothy Brian Stachowiak, Keiji Yamashita | 2024-12-31 |
| 11752519 | Planarization method and photocurable composition | Toshiki Ito, Naoki Kiyohara, Timothy Brian Stachowiak, Keiji Yamashita | 2023-09-12 |
| 10935884 | Pattern forming method and methods for manufacturing processed substrate, optical component and quartz mold replica as well as coating material for imprint pretreatment and set thereof with imprint resist | Shingo Ishida, Toshiaki Ando, Toshiki Ito, Timothy Brian Stachowiak, Weijun Liu | 2021-03-02 |
| 10883006 | Pattern forming method as well as production methods for processed substrate, optical component, circuit board, electronic component and imprint mold | Toshiki Ito, Timothy Brian Stachowiak, Niyaz Khusnatdinov, Weijun Liu | 2021-01-05 |
| 10856422 | Method of forming pattern on a substrate | Toshiki Ito, Shiori Yonezawa, Akiko Iimura | 2020-12-01 |
| 10845700 | Pattern forming method as well as production methods for processed substrate, optical component, circuit board, electronic component and imprint mold | Toshiki Ito, Weijun Liu, Timothy Brian Stachowiak, Niyaz Khusnatdinov | 2020-11-24 |
| 10754245 | Pattern forming method as well as production methods for processed substrate, optical component, circuit board, electronic component and imprint mold | Toshiki Ito, Tomonori Otani, Weijun Liu, Timothy Brian Stachowiak | 2020-08-25 |
| 10456974 | Photocurable composition, methods for producing film, optical component, circuit board, and electronic component by using the same, and cured product | Shiori Yonezawa, Toshiki Ito, Keiji Yamashita, Youji Kawasaki | 2019-10-29 |
| 10293543 | Method of producing a patterned film | Takeshi Honma, Toshiki Ito, Shiori Yonezawa, Keiji Yamashita | 2019-05-21 |
| 9957340 | Imprinting method and curable composition for imprinting | Toshiki Ito, Akiko Iimura, Youji Kawasaki, Keiji Yamashita, Jun Kato | 2018-05-01 |
| 7916273 | Exposure apparatus and device manufacturing method | Masaru Nyui, Keiji Yamashita | 2011-03-29 |
| 7072438 | Reflection type mask | Masami Tsukamoto, Yutaka Watanabe, Shinichi Hara, Hiroshi Maehara | 2006-07-04 |
| 7027227 | Three-dimensional structure forming method | Kenichiro Mori | 2006-04-11 |
| 6829091 | Optical system and optical instrument with diffractive optical element | Takashi Kato, Kenji Saitoh, Hiroshi Maehara, Makoto Ogusu | 2004-12-07 |
| 6728332 | X-ray mask, and exposure method and apparatus using the same | Masami Tsukamoto, Yutaka Watanabe, Shinichi Hara, Hiroshi Maehara | 2004-04-27 |
| 6723475 | Reflection-type mask for use in pattern exposure, manufacturing method therefor, exposure apparatus, and method of manufacturing a device | Masami Tsukamoto | 2004-04-20 |
| 6645707 | Device manufacturing method | Mitsuaki Amemiya, Shunichi Uzawa, Yutaka Watanabe | 2003-11-11 |
| 6627468 | Method for manufacturing optical element, optical element, optical system using optical element, optical apparatus and exposure apparatus using optical system, and method for manufacturing device | — | 2003-09-30 |
| 6605392 | X-ray mask structure, and X-ray exposure method and apparatus using the same | Takahiro Matsumoto | 2003-08-12 |
| 6455203 | Mask structure and method of manufacturing the same | Mitsuaki Amemiya, Shunichi Uzawa | 2002-09-24 |
| 6449332 | Exposure apparatus, and device manufacturing method | — | 2002-09-10 |
| 6418187 | X-ray mask structure, and X-ray exposure method and apparatus using the same | Shigeru Terashima | 2002-07-09 |
| 6337161 | Mask structure exposure method | Hideo Kato, Hiroshi Maehara | 2002-01-08 |
| 6317479 | X-ray mask, and exposure method and apparatus using the same | Masami Tsukamoto, Yutaka Watanabe, Shinichi Hara, Hiroshi Maehara | 2001-11-13 |
| 6272202 | Exposure method and X-ray mask structure for use with the same | Shunichi Uzawa, Mitsuaki Amemiya, Yutaka Watanabe | 2001-08-07 |