Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774607 | Scintillator panel and radiation imaging apparatus | Taiji Tomita, Tomoyuki Oike, Tamaki Kobayashi | 2023-10-03 |
| 11069729 | Photoelectric conversion device, and equipment | Satoshi Yamabi, Yoshinori Kotani, Akio Kashiwazaki, Yoshihiro Ohashi | 2021-07-20 |
| 9842985 | Manufacturing method for piezoelectric ceramics | Tatsuya Suzuki, Mikio Shimada, Toshihiro Ifuku, Takanori Matsuda, Makoto Kubota +1 more | 2017-12-12 |
| 9231188 | Piezoelectric ceramics, manufacturing method therefor, piezoelectric element, liquid discharge head, ultrasonic motor, and dust removal device | Tatsuya Suzuki, Mikio Shimada, Toshihiro Ifuku, Takanori Matsuda, Makoto Kubota +1 more | 2016-01-05 |
| 7425363 | Laminate film and composite structure with imaged recording medium | Noboru Kunimine, Masaya Kobayashi | 2008-09-16 |
| 7133489 | X-ray illumination optical system and X-ray reduction exposure apparatus | Akira Miyake | 2006-11-07 |
| 7072438 | Reflection type mask | Keiko Chiba, Yutaka Watanabe, Shinichi Hara, Hiroshi Maehara | 2006-07-04 |
| 7061573 | Contamination prevention in optical system | — | 2006-06-13 |
| 6836531 | X-ray projection exposure apparatus and a device manufacturing method | Shinichi Hara | 2004-12-28 |
| 6834098 | X-ray illumination optical system and X-ray reduction exposure apparatus | Akira Miyake | 2004-12-21 |
| 6819396 | Exposure apparatus, and device manufacturing method | Masayuki Tanabe, Yasuaki Fukuda | 2004-11-16 |
| 6802925 | Laminating film and lamination process using the same | Masaya Kobayashi, Toru Nagata, Kenji Suzuki | 2004-10-12 |
| 6728332 | X-ray mask, and exposure method and apparatus using the same | Keiko Chiba, Yutaka Watanabe, Shinichi Hara, Hiroshi Maehara | 2004-04-27 |
| 6723475 | Reflection-type mask for use in pattern exposure, manufacturing method therefor, exposure apparatus, and method of manufacturing a device | Keiko Chiba | 2004-04-20 |
| 6668037 | X-ray projection exposure apparatus and a device manufacturing method | Shinichi Hara | 2003-12-23 |
| 6642528 | Alignment mark detection method, and alignment method, exposure method and device, and device production method, making use of the alignment mark detection method | Mitsuaki Amemiya | 2003-11-04 |
| 6584168 | X-ray projection exposure apparatus and a device manufacturing method | Shinichi Hara | 2003-06-24 |
| 6504896 | X-ray illumination optical system and x-ray reduction exposure apparatus | Akira Miyake | 2003-01-07 |
| 6331709 | Alignment mark detection method, and alignment method, exposure method and device, and device production method making use of the alignment mark detection method | Mitsuaki Amemiya | 2001-12-18 |
| 6317479 | X-ray mask, and exposure method and apparatus using the same | Keiko Chiba, Yutaka Watanabe, Shinichi Hara, Hiroshi Maehara | 2001-11-13 |
| 6310934 | X-ray projection exposure apparatus and a device manufacturing method | Shinichi Hara | 2001-10-30 |
| 6084938 | X-ray projection exposure apparatus and a device manufacturing method | Shinichi Hara | 2000-07-04 |
| 6038279 | X-ray generating device, and exposure apparatus and semiconductor device production method using the X-ray generating device | Akira Miyake | 2000-03-14 |
| 6014421 | Radiation reduction exposure apparatus and method of manufacturing semiconductor device | Yuji Chiba | 2000-01-11 |
| 5995582 | X-ray reduction exposure apparatus and device manufacturing method using the same | Shigeru Terashima | 1999-11-30 |