Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5896438 | X-ray optical apparatus and device fabrication method | Akira Miyake | 1999-04-20 |
| 5889758 | Reflection type mask structure and exposure apparatus using the same | Hiroshi Maehara | 1999-03-30 |